Invention Application
- Patent Title: MICROMECHANICAL YAW-RATE SENSOR
- Patent Title (中): 微电子传感器
-
Application No.: US12834953Application Date: 2010-07-13
-
Publication No.: US20110023600A1Publication Date: 2011-02-03
- Inventor: Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
- Applicant: Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
- Priority: DE102009027897.4 20090721
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
Public/Granted literature
- US08490483B2 Micromechanical yaw-rate sensor Public/Granted day:2013-07-23
Information query