Invention Application
- Patent Title: METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT
- Patent Title (中): 充电颗粒光束仪器中的样品检测方法
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Application No.: US12896274Application Date: 2010-10-01
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Publication No.: US20110031396A1Publication Date: 2011-02-10
- Inventor: Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
- Applicant: Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
- Applicant Address: US TX Dallas
- Assignee: OMNIPROBE, INC.
- Current Assignee: OMNIPROBE, INC.
- Current Assignee Address: US TX Dallas
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
Public/Granted literature
- US08168949B2 Method for stem sample inspection in a charged particle beam instrument Public/Granted day:2012-05-01
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