METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT
    1.
    发明申请
    METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT 有权
    充电颗粒光束仪器中的样品检测方法

    公开(公告)号:US20080258056A1

    公开(公告)日:2008-10-23

    申请号:US12041217

    申请日:2008-03-03

    IPC分类号: G01N23/00

    摘要: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

    摘要翻译: 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二,第三和第四角度的函数的第一角度。 根据所述角度计算第五角度,其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转,然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转,将样品定位成垂直于FIB电子束的轴线进行STEM分析。

    METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT
    4.
    发明申请
    METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT 有权
    充电颗粒光束仪器中的样品检测方法

    公开(公告)号:US20110031396A1

    公开(公告)日:2011-02-10

    申请号:US12896274

    申请日:2010-10-01

    IPC分类号: G01N23/00

    摘要: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

    摘要翻译: 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二,第三和第四角度的函数的第一角度。 根据所述角度计算第五角度,其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转,然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转,将样品定位成垂直于FIB电子束的轴线进行STEM分析。

    Method for stem sample inspection in a charged particle beam instrument
    5.
    发明授权
    Method for stem sample inspection in a charged particle beam instrument 有权
    带电粒子束仪器中的茎样品检查方法

    公开(公告)号:US08247768B2

    公开(公告)日:2012-08-21

    申请号:US12896281

    申请日:2010-10-01

    IPC分类号: G01N23/00

    摘要: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

    摘要翻译: 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二,第三和第四角度的函数的第一角度。 根据所述角度计算第五角度,其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的投影之间的角度。 样品台按计算出的第五个角度旋转,然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转,将样品定位成垂直于FIB电子束的轴线进行STEM分析。

    Method for STEM sample inspection in a charged particle beam instrument
    6.
    发明授权
    Method for STEM sample inspection in a charged particle beam instrument 有权
    带电粒子束仪器中STEM样品检测方法

    公开(公告)号:US07834315B2

    公开(公告)日:2010-11-16

    申请号:US12041217

    申请日:2008-03-03

    IPC分类号: G01N23/00

    摘要: A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

    摘要翻译: 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二,第三和第四角度的函数的第一角度。 根据所述角度计算第五角度,其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转,然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转,将样品定位成垂直于FIB电子束的轴线进行STEM分析。

    GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT
    7.
    发明申请
    GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT 审中-公开
    用于在充电颗粒仪器中进行STEM分析的网格保持器

    公开(公告)号:US20100025580A1

    公开(公告)日:2010-02-04

    申请号:US12533565

    申请日:2009-07-31

    IPC分类号: H01J37/26 H01J37/20

    摘要: A grid holder for STEM analysis in a charged-particle instrument has a base jaw and a pivoting jaw. Both jaws have a substantially congruent inclined portion. The base jaw has a flat portion for mounting the holder on the sample carousel of a charged-particle instrument, such as a dual beam FIB. The inclined portion of the jaws is inclined to the flat portion of the holder at an angle A approximately equal to the difference between 90 degrees and the angle between the electron beam and the ion beam in the charged-particle instrument. The inclined portion of the jaws has a pocket for receiving and holding a sample grid. When a sample is mounted on the grid and the grid is held by the grid holder, the sample will be correctly oriented for ion-beam thinning when the sample carousel is horizontal. The thinned sample may then be placed perpendicular to the electron beam for STEM analysis by tilting the sample carousel by the same angle A.

    摘要翻译: 带电粒子仪器中STEM分析的格栅支架具有基座卡爪和枢转卡爪。 两个钳口具有大致一致的倾斜部分。 基座钳具有用于将支架安装在带电粒子仪器(例如双光束FIB)的样品转盘上的平坦部分。 钳口的倾斜部分以大致等于带电粒子仪器中的90度与电子束和离子束之间的角度的角度A相对于保持器的平坦部分倾斜。 夹爪的倾斜部分具有用于接收和保持样品网格的口袋。 当样品安装在栅格上并且格栅由栅格保持器保持时,样品转盘水平时样品将被正确定向以进行离子束变薄。 然后可以将样品转盘垂直于电子束放置以进行STEM分析,将样品转盘倾斜相同的角度A.

    Concurrent Management of Adaptive Programs
    9.
    发明申请
    Concurrent Management of Adaptive Programs 有权
    自适应程序并发管理

    公开(公告)号:US20080288950A1

    公开(公告)日:2008-11-20

    申请号:US11750441

    申请日:2007-05-18

    IPC分类号: G06F9/50 G06F9/46

    CPC分类号: G06F9/5066

    摘要: A method for concurrent management of adaptive programs is disclosed wherein changes in a set of modifiable references are initially identified. A list of uses of the changed references is next computed using records made in structures of the references. The list is next inserted into an elimination queue. Comparison is next made of each of the uses to the other uses to determine independence or dependence thereon. Determined dependent uses are eliminated and the preceding steps are repeated for all determined independent uses until all dependencies have been eliminated.

    摘要翻译: 公开了一种用于并行管理自适应程序的方法,其中初始地识别一组可修改参考文献中的改变。 接下来使用在引用的结构中作出的记录来计算更改的引用的使用列表。 列表接下来插入消除队列。 下一步将对其他用途的各种用途进行比较,以确定其独立性或依赖性。 消除确定的依赖用途,并且对于所有确定的独立使用重复前述步骤,直到所有依赖关系被消除。

    Method for distributing and geographically load balancing location aware communication device client-proxy applications
    10.
    发明申请
    Method for distributing and geographically load balancing location aware communication device client-proxy applications 有权
    用于分发和地理位置感知通信设备客户端 - 代理应用程序的方法

    公开(公告)号:US20050246711A1

    公开(公告)日:2005-11-03

    申请号:US10821050

    申请日:2004-04-08

    IPC分类号: G06F9/46 G06F9/50 H04L29/08

    摘要: A method and system for balancing server work load for cellular phone client-proxy applications in an environment where the clients change position within a given geographic area is disclosed. The method comprises the steps of mapping, monitoring, automatically re-mapping the system when required, updating a map address book, and updating a client address book. The system has a mapping system and a communication system connected to a plurality of servers, proxy servers and applications by an internal network. The proxy servers are connected to a plurality of clients by the Internet. If a threshold is exceeded, the monitoring program sends a message to a mapping program. Upon receipt of the message, the mapping program uses a rules engine to calculate a new map graph to remove load from an overloaded server (or servers) and to adjust communication requirements for data by reconfiguring partitions.

    摘要翻译: 公开了一种用于在客户端改变给定地理区域内的位置的环境中平衡蜂窝电话客户端 - 代理应用的服务器工作负载的方法和系统。 该方法包括在需要时映射,监控,自动重新映射系统,更新地图地址簿和更新客户端地址簿的步骤。 该系统具有映射系统和通过内部网络连接到多个服务器,代理服务器和应用的通信系统。 代理服务器通过因特网连接到多个客户端。 如果超过阈值,则监视程序向映射程序发送消息。 在收到消息后,映射程序使用规则引擎来计算新的映射图,以从过载的服务器(或服务器)中删除负载,并通过重新配置分区来调整数据的通信要求。