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1.发明申请公开(公告)号：US20100051802A1
公开(公告)日：2010-03-04
申请号：US12201447
申请日：2008-08-29
IPC分类号： G01N23/00
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.
摘要翻译： 用于能量束仪器的单通道光学处理系统具有用于处理辐射和照射辐射的单独源。 处理辐射和照射辐射在单个光学路径中组合并通过自聚焦棒透镜指向能量束仪器内部的样品表面。 因此，自聚焦棒透镜具有与样品表面的工作距离，其不会干扰这些仪器中的离子束和电子束的典型布置。 偏振器和分束器的组合允许组合的入射辐射和从样品表面反射的组合辐射分离并通过相同的光学通道返回，使得反射的辐射可以被引导到诸如相机或光谱仪的光学检测器 。 在其他实施例中，样品表面的附加照明以与自聚焦棒透镜的中心轴成一定角度设置。
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2.发明申请公开(公告)号：US20090078060A1
公开(公告)日：2009-03-26
申请号：US11860663
申请日：2007-09-25
申请人： Thomas M. Moore , Gonzalo Amador
发明人： Thomas M. Moore , Gonzalo Amador
CPC分类号： G01N1/286 , B25J21/02 , G01N35/04 , G01N2035/00277 , G01N2035/00316 , H01J37/16 , H01J37/185 , H01J2237/184 , H01J2237/204 , H01J2237/31745 , Y10T436/25
摘要： An apparatus for the transfer of samples from an analytical instrument has a sealable transfer capsule and a means for connecting the transfer capsule to a vacuum instrument, such as a FIB, through an interface connected to the instrument. The capsule has a door that can be opened to insert a sample holder, such as a TEM sample holder, into the instrument, and then closed when the sample holder holding an excised sample is retracted back into the transfer capsule. The instrument interface contains means for sealing the instrument before the transfer capsule holding a sample is disconnected, and for purging the transfer capsule with an inert gas. The sample may thus be transported in the sealed transfer capsule without exposure to the ambient atmosphere. The sample may be transported to and connected to a glove box also purged with an inert gas for examination or further operations.
摘要翻译： 用于从分析仪器传送样品的装置具有可密封的转移胶囊和用于通过连接到仪器的界面将转移胶囊连接到诸如FIB的真空装置的装置。 胶囊具有可以打开的门，以将诸如TEM样品保持器的样品保持器插入仪器中，然后当保持切除的样品的样品架缩回到转移胶囊中时关闭。 仪器接口包含用于在保持样品的转移胶囊断开之前密封仪器的装置，并且用惰性气体吹扫转移胶囊。 因此，样品可以在密封的转移胶囊内运输而不暴露于环境大气中。 样品可以运送到也连接到也用惰性气体吹扫的手套箱进行检查或进一步操作。
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3.发明授权公开(公告)号：US07446542B2
公开(公告)日：2008-11-04
申请号：US11367562
申请日：2006-03-03
IPC分类号： G01R31/302 , G01R31/28
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： An apparatus for testing flip-chip packages has a programmed computer, a test-engine stage for applying an impact to at least one package under test, and a monitoring stage. The test-engine stage causes an impact on the package on the side opposite its ball-grid array. The test-engine stage has actuators connected to the test-engine stage and the computer, for moving and aligning the test-engine stage. The monitoring stage has a digital camera connected to the computer for transmitting digital images from the ball-grid array side of the package to the computer. A microscope is preferably connected to the digital camera. A sample stage located between the test-engine stage and the monitoring stage holds the package under test. The sample stage has an acoustic transducer capable of being removably connected to the package under test. The acoustic transducer is connected to the computer for transmitting signals from the acoustic transducer to the computer.
摘要翻译： 用于测试倒装芯片封装的装置具有编程的计算机，用于对至少一个待测试包进行冲击的测试引擎阶段和监视阶段。 测试引擎级在与球栅阵列相反的一侧对包装产生影响。 测试发动机级具有连接到测试发动机级和计算机的致动器，用于移动和对准测试引擎级。 监控级具有连接到计算机的数字照相机，用于将数字图像从包装的球栅阵列侧传输到计算机。 显微镜优选地连接到数码相机。 位于测试引擎级和监控级之间的样品台保持被测试的包装。 样品台具有能够可拆卸地连接到被测试包装的声学换能器。 声学换能器连接到计算机，用于将信号从声学传感器传输到计算机。
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公开(公告)号：US20080258056A1
公开(公告)日：2008-10-23
申请号：US12041217
申请日：2008-03-03
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译： 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。
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公开(公告)号：US06777674B2
公开(公告)日：2004-08-17
申请号：US10252659
申请日：2002-09-23
申请人： Thomas M. Moore , John M. Anthony
发明人： Thomas M. Moore , John M. Anthony
IPC分类号： G01N2322
CPC分类号： G01N23/227 , G01N2001/028 , G01N2033/0095
摘要： We disclose a method for analyzing the composition of a microscopic particle resting on a first sample surface. The method comprises positioning a micro-manipulator probe near the particle; attaching the particle to the probe; moving the probe and the attached particle away from the first sample surface; positioning the particle on a second sample surface; and, analyzing the composition of the particle on the second sample surface by energy-dispersive X-ray analysis or detection of Auger electrons. The second surface has a reduced or non-interfering background signal during analysis relative to the background signal of the first surface. We also disclose methods for adjusting the electrostatic forces and DC potentials between the probe, the particle, and the sample surfaces to effect removal of the particle, and its transfer and relocation to the second sample surface.
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公开(公告)号：US06570170B2
公开(公告)日：2003-05-27
申请号：US10085968
申请日：2002-02-28
申请人： Thomas M. Moore
发明人： Thomas M. Moore
IPC分类号： H01J3708
CPC分类号： G01N1/286 , H01J37/20 , H01J37/3056
摘要： A sample (180) is separated from an integrated circuit chip or a semiconductor wafer (100) for examination so that the resulting sample (180) can be moved to a location for examination by TEM, SEM or other means. A sample (180) portion of the chip or wafer (100) containing an area of interest is separated with a two cuts (140, 160) at two different angles (130, 170) by a focused ion-beam (120). Only after the sample (180) is separated is it fixed to a micromanipulator probe (190). The sample (180) is then moved by the probe (190) to the location for examination.
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公开(公告)号：US20130037713A1
公开(公告)日：2013-02-14
申请号：US13567487
申请日：2012-08-06
IPC分类号： H01J37/26 , G01N23/201 , G21K5/08
CPC分类号： G01N1/32 , B82Y10/00 , B82Y40/00 , G01N1/286 , G01N2001/2886 , G02B21/32 , H01J37/20 , H01J2237/0216 , H01J2237/208 , H01J2237/31745
摘要： A method for processing a sample in a charged-particle beam microscope. A sample is collected from a substrate and the sample is attached to the tip of a nanomanipulator. The sample is optionally oriented to optimize further processing. The nanomanipulator tip is brought into contact with a stabilizing support to minimize drift or vibration of the sample. The attached sample is then stabilized and available for preparation and analysis.
摘要翻译： 一种在带电粒子束显微镜中处理样品的方法。 从基材收集样品，并将样品连接到纳米机械手的末端。 该样品任选定向以优化进一步的处理。 纳米操纵器尖端与稳定支撑件接触以最小化样品的漂移或振动。 然后将附着的样品稳定并可用于制备和分析。
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公开(公告)号：US20110031397A1
公开(公告)日：2011-02-10
申请号：US12896281
申请日：2010-10-01
IPC分类号： H01J37/28
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
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公开(公告)号：US07414252B2
公开(公告)日：2008-08-19
申请号：US11265934
申请日：2005-11-03
IPC分类号： G21G5/00
CPC分类号： H01J37/302 , B82Y15/00 , G01N1/32 , H01J37/20 , H01J37/22 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/30411 , H01J2237/30472 , H01J2237/31745
摘要： An apparatus for performing automated in-situ lift-out of a sample from a specimen includes a computer having a memory with computer-readable instructions, a stage for a specimen and a nano-manipulator. The stage and the nano-manipulator are controlled by motion controllers connected to the computer. The nano-manipulator has a probe tip for attachment to samples excised from the specimen. The computer-readable instructions include instructions to cause the stage motion controllers and the nano-manipulator motion controllers, as well as an ion-beam source, to automatically perform in-situ lift-out of a sample from the specimen.
摘要翻译： 用于从样本进行样品的自动原位提取的装置包括具有具有计算机可读指令的存储器的计算机，用于样本的台和纳米操纵器。 舞台和纳米操纵器由连接到计算机的运动控制器控制。 纳米操纵器具有用于附着到从样品切除的样品的探针尖端。 计算机可读指令包括使载物台运动控制器和纳米操纵器运动控制器以及离子束源自动执行样品从样本的原位提取的指令。
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公开(公告)号：US06561868B1
公开(公告)日：2003-05-13
申请号：US09727187
申请日：2000-11-30
IPC分类号： B24B4900
CPC分类号： B24B37/30 , B24B37/013 , B24B49/10
摘要： A system for controlling a polishing machine during polishing of a workpiece, such as a semiconductor wafer, includes a carrier which has an interface surface for engaging a workpiece and establishing ultrasonic coupling thereto. At least one crystal oscillator is ultrasonically coupled to the carrier and operates at a resonant frequency in an ultrasonic band which is indicative of a desired polishing depth of the workpiece, such as the endpoint of polishing. A detector circuit provides an output signal which is representative of an output level of the crystal oscillator. A processor circuit receives the signal from the detector circuit and provides a signal to the polishing machine when the amplitude of the signal from the detector circuit indicates that the desired polishing endpoint has been reached. A number of crystal oscillators can be spatially arranged on the carrier to establish a local polishing depth detection array.
摘要翻译： 一种用于在诸如半导体晶片的工件的抛光期间控制抛光机的系统包括具有用于接合工件并与其建立超声耦合的界面的载体。 至少一个晶体振荡器被超声波耦合到载体上，并以超声波带的谐振频率工作，这表明了工件的期望的抛光深度，例如抛光的终点。 检测器电路提供表示晶体振荡器的输出电平的输出信号。 处理器电路接收来自检测器电路的信号，并且当来自检测器电路的信号的振幅指示已经达到所需的抛光端点时，向抛光机提供信号。 可以将多个晶体振荡器空间布置在载体上以建立局部抛光深度检测阵列。
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