发明申请
- 专利标题: METHOD AND APPARATUS FOR DEPOSITION OF GRADED OR MULTI-LAYER TRANSPARENT FILMS
- 专利标题(中): 沉积层或多层透明膜的方法和装置
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申请号: US12843778申请日: 2010-07-26
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公开(公告)号: US20110039366A1公开(公告)日: 2011-02-17
- 发明人: Bulent M. Basol , Mustafa Pinarbasi , James Freitag
- 申请人: Bulent M. Basol , Mustafa Pinarbasi , James Freitag
- 申请人地址: US CA San Jose
- 专利权人: SOLOPOWER, INC.
- 当前专利权人: SOLOPOWER, INC.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; H01L31/0264
摘要:
In one embodiment, a continuous electroless deposition method and a system to form a solar cell buffer layer with a varying composition through its thickness are provided. The composition of the buffer layer is varied by varying the composition of a chemical bath deposition solution applied onto an absorber surface on which the buffer layer with varying composition is formed. In one example, the buffer layer with varying composition includes a first section containing CdS, a second section containing CdZnS formed on top of the already deposited CdS, and a third section containing ZnS is formed on the second section All the process steps are applied in a roll-to-roll fashion. In another embodiment, a transparent conductive layer including a first transparent conductive film such as aluminum doped zinc oxide and a second transparent conductive film such as indium tin oxide is deposited over the buffer layer with the varying composition.
公开/授权文献
- US08318530B2 Solar cell buffer layer having varying composition 公开/授权日:2012-11-27
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