公开(公告)号：US08318530B2

公开(公告)日：2012-11-27

申请号：US12843778

申请日：2010-07-26

申请人： Bulent M. Basol ,  Mustafa Pinarbasi ,  James Freitag

发明人： Bulent M. Basol ,  Mustafa Pinarbasi ,  James Freitag

IPC分类号： H01L21/00

CPC分类号： H01L31/206 ,  C23C18/12 ,  C23C18/1204 ,  C23C18/125 ,  H01L31/022475 ,  H01L31/022483 ,  H01L31/0322 ,  H01L31/0749 ,  H01L31/1884 ,  Y02E10/541 ,  Y02P70/521

摘要： Described is a continuous electroless deposition method and a system to form a solar cell buffer layer with a varying composition through its thickness are provided. The composition of the buffer layer is varied by varying the composition of a chemical bath deposition solution applied onto an absorber surface on which the buffer layer with varying composition is formed. In one example, the buffer layer with varying composition includes a first section containing CdS, a second section containing CdZnS formed on top of the already deposited CdS, and a third section containing ZnS is formed on the second section All the process steps are applied in a roll-to-roll fashion. In another example, a transparent conductive layer including a first transparent conductive film such as aluminum doped zinc oxide and a second transparent conductive film such as indium tin oxide is deposited over the buffer layer with the varying composition.

摘要翻译： 描述了一种连续的无电沉积方法，并且提供了通过其厚度形成具有不同组成的太阳能电池缓冲层的系统。 通过改变施加到其上形成有不同组成的缓冲层的吸收体表面上的化学浴沉积溶液的组成来改变缓冲层的组成。 在一个实例中，具有不同成分的缓冲层包括含有CdS的第一部分，在已经沉积的CdS的顶部上形成的包含CdZnS的第二部分，在第二部分上形成包含ZnS的第三部分。所有的工艺步骤都应用于 一对一的滚动时尚。 在另一个实例中，包括第一透明导电膜如铝掺杂氧化锌和第二透明导电膜如氧化铟锡的透明导电层沉积在具有不同组成的缓冲层上。

公开(公告)号：US20110039366A1

公开(公告)日：2011-02-17

申请号：US12843778

申请日：2010-07-26

申请人： Bulent M. Basol ,  Mustafa Pinarbasi ,  James Freitag

发明人： Bulent M. Basol ,  Mustafa Pinarbasi ,  James Freitag

IPC分类号： H01L31/18 ,  H01L31/0264

CPC分类号： H01L31/206 ,  C23C18/12 ,  C23C18/1204 ,  C23C18/125 ,  H01L31/022475 ,  H01L31/022483 ,  H01L31/0322 ,  H01L31/0749 ,  H01L31/1884 ,  Y02E10/541 ,  Y02P70/521

摘要： In one embodiment, a continuous electroless deposition method and a system to form a solar cell buffer layer with a varying composition through its thickness are provided. The composition of the buffer layer is varied by varying the composition of a chemical bath deposition solution applied onto an absorber surface on which the buffer layer with varying composition is formed. In one example, the buffer layer with varying composition includes a first section containing CdS, a second section containing CdZnS formed on top of the already deposited CdS, and a third section containing ZnS is formed on the second section All the process steps are applied in a roll-to-roll fashion. In another embodiment, a transparent conductive layer including a first transparent conductive film such as aluminum doped zinc oxide and a second transparent conductive film such as indium tin oxide is deposited over the buffer layer with the varying composition.

摘要翻译： 在一个实施例中，提供连续的无电沉积方法和通过其厚度形成具有变化的组成的太阳能电池缓冲层的系统。 通过改变施加到其上形成有不同组成的缓冲层的吸收体表面上的化学浴沉积溶液的组成来改变缓冲层的组成。 在一个实例中，具有不同成分的缓冲层包括含有CdS的第一部分，在已经沉积的CdS的顶部上形成的包含CdZnS的第二部分，在第二部分上形成包含ZnS的第三部分。所有的工艺步骤都应用于 一对一的滚动时尚。 在另一个实施例中，包含第一透明导电膜（例如掺杂铝的氧化锌）和第二透明导电膜（例如氧化铟锡）的透明导电层以不同的组成沉积在缓冲层上。

公开(公告)号：US20090283140A1

公开(公告)日：2009-11-19

申请号：US12123424

申请日：2008-05-19

申请人： James Freitag ,  Mustafa Pinarbasi ,  Bulent M. Basol

发明人： James Freitag ,  Mustafa Pinarbasi ,  Bulent M. Basol

IPC分类号： H01L31/00 ,  H01L31/02

CPC分类号： H01L31/0392 ,  H01L31/022425 ,  H01L31/0322 ,  H01L31/03925 ,  H01L31/03928 ,  Y02E10/541 ,  Y02P70/521

摘要： A solar cell manufacturing method which forms a Group IBIIAVIA absorber layer over a front side of a metallic substrate. The back side of the metallic substrate is coated with a conductive protection layer, such as a metal nitride material, that that does not form a high resistivity selenide or sulfide films when exposed to Se and S species at temperatures in the range of 400-600 C. Additionally, the protection material layer is stable in highly acidic and basic electroplating solutions that are employed to deposit layers or precursor layers comprising Cu and at least one of In, Ga, Se and S.

摘要翻译： 一种太阳能电池制造方法，其在金属基板的正面上形成IBIIAVIA族吸收体层。 金属基板的背面涂覆有导电保护层，例如金属氮化物材料，当在400-600℃的温度下暴露于Se和S物质时，其不形成高电阻率的硒化物或硫化物膜 C.此外，保护材料层在用于沉积包含Cu和In，Ga，Se和S中的至少一种的层或前体层的高酸性和碱性电镀溶液中是稳定的。

公开(公告)号：US20100140078A1

公开(公告)日：2010-06-10

申请号：US12632484

申请日：2009-12-07

申请人： Mustafa Pinarbasi ,  James Freitag ,  Jorge Vasquez ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  James Freitag ,  Jorge Vasquez ,  Bulent M. Basol

IPC分类号： C23C14/34 ,  C23C14/56

CPC分类号： C23C14/042 ,  C23C14/165 ,  C23C14/541 ,  C23C14/562 ,  H01L31/0322 ,  H01L31/03928 ,  H01L31/0749 ,  H01L31/18 ,  Y02E10/541 ,  Y02P70/521

摘要： The present invention provides a roll to roll system and a method to sputter deposit various conductive films on a back surface and a front surface of a continuous substrate to form protected base structures for Group IBIIIAVIA thin film solar cells. In one embodiment of the invention, a back protection film is sputter deposited onto the entire back side of the substrate in a first deposition station without transferring heat from the substrate. Next, a first front film is sputter deposited in a second deposition station to partially cover the front side of the substrate while heat is transferred from substrate by a cooling surface of a cooling mechanism in the second deposition station. The second film does not cover the edges of the substrate to avoid contaminating the cooling surface with the depositing material. Other embodiments are directed to specifics regarding the depositing of these films, adding other films, and a system for depositing the films.

摘要翻译： 本发明提供一种卷对卷系统和一种溅射沉积连续衬底的背表面和前表面上的各种导电膜以形成IBIIIAVIA族薄膜太阳能电池的受保护的基础结构的方法。 在本发明的一个实施例中，在第一沉积站中的背衬保护膜被溅射沉积在基板的整个背面上，而不会从基板传递热量。 接下来，在第二沉积站中溅射沉积第一前膜以部分地覆盖基板的前侧，同时通过第二沉积站中的冷却机构的冷却表面从基板转移热量。 第二个膜不覆盖基板的边缘，以避免用沉积材料污染冷却表面。 其他实施例涉及关于这些膜的沉积，添加其它膜以及用于沉积膜的系统的细节。

公开(公告)号：US20100147677A1

公开(公告)日：2010-06-17

申请号：US12607689

申请日：2009-10-28

申请人： Mustafa Pinarbasi ,  Homayoun Talieh ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Homayoun Talieh ,  Bulent M. Basol

IPC分类号： C23C14/34 ,  C23C14/56

CPC分类号： G06F3/1446 ,  B05D3/0493 ,  B05D2252/02 ,  C23C14/562 ,  G06F3/1438 ,  G09F9/30 ,  G09F9/301 ,  G09F9/33 ,  G09G3/2088 ,  G09G3/32 ,  G09G2300/026 ,  G09G2300/0452 ,  G09G2320/0626 ,  G09G2380/02 ,  G09G2380/06 ,  H01L31/03923 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

摘要： A roll to roll system for depositing a material on a workpiece is provided. In one embodiment, the system includes a drum, which rotates about an axis that is transverse to a process direction, and a number of PVD deposition units. The drum further includes a peripheral surface that includes a groove having a recessed workpiece contact surface that is parallel to the axis and disposed between a first side wall and a second side wall. A portion of the recessed workpiece contact surface supports a section of the workpiece and the first and second side walls maintain the section of the workpiece on the portion of the recessed workpiece contact surface as the workpiece is moved along the process direction. The PVD deposition units are disposed across from some of the portion of the peripheral surface and continuously deposit the material across a width of some of the section of the workpiece.

摘要翻译： 提供了一种用于在工件上沉积材料的卷对卷系统。 在一个实施例中，系统包括围绕横向于工艺方向的轴线旋转的滚筒和多个PVD沉积单元。 滚筒还包括外围表面，该外围表面包括凹槽，凹槽具有凹入的工件接触表面，其平行于轴线并且设置在第一侧壁和第二侧壁之间。 凹陷工件接触表面的一部分支撑工件的一部分，并且随着工件沿着工艺方向移动，第一和第二侧壁将工件的部分保持在凹入工件接触表面的部分上。 PVD沉积单元跨越外围表面的一些部分设置，并且将材料连续地沉积在工件的一些部分的宽度上。

公开(公告)号：US20090203165A1

公开(公告)日：2009-08-13

申请号：US12233563

申请日：2008-09-18

申请人： Mustafa Pinarbasi ,  Serdar Aksu ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Serdar Aksu ,  Bulent M. Basol

IPC分类号： H01L31/0272 ,  H01L31/032

CPC分类号： H01L31/022425 ,  C25D3/56 ,  C25D5/50 ,  H01L31/0322 ,  H01L31/03928 ,  Y02E10/541 ,  Y02P70/521

摘要： A thin film solar cell including a Group IBIIIAVIA absorber layer on a defect free base including a stainless steel substrate is provided. The stainless steel substrate of the base is surface treated to remove the surface roughness such as protrusions that cause shunts. Before removing the protrusions, a thin protective ruthenium film is first deposited on the recessed surface portions of the substrate to protect these portions during the following protrusion removal. The protrusions on the surface receives very little or no ruthenium during the deposition. After the ruthenium film is formed, the protrusions are etched and removed by an etchant which only attacks the stainless steel but neutral to the ruthenium film. A contact layer is formed over the ruthenium layer and the exposed portions of the substrate to complete the base.

摘要翻译： 提供一种薄膜太阳能电池，其包括在包括不锈钢基底的无缺陷基底上的IBIIIAVIA族吸收层。 对基体的不锈钢基材进行表面处理以去除表面粗糙度，例如引起分流的凸起。 在移除突起之前，首先将薄的保护性钌膜沉积在基底的凹入表面部分上，以在随后的突起移除期间保护这些部分。 在沉积过程中，表面上的突起很少或没有钌。 在形成钌膜之后，通过蚀刻剂蚀刻并除去突起，蚀刻剂仅侵蚀不锈钢，但对钌膜是中性的。 在钌层和基板的暴露部分之上形成接触层以完成基底。

公开(公告)号：US08207012B2

公开(公告)日：2012-06-26

申请号：US12163819

申请日：2008-06-27

申请人： Mustafa Pinarbasi ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Bulent M. Basol

IPC分类号： H01L21/00

CPC分类号： H01L31/0322 ,  H01L31/03926 ,  H01L31/03928 ,  H01L31/0504 ,  H01L31/0749 ,  Y02E10/541 ,  Y02P70/521

摘要： A system and method of forming a thin film solar cell with a metallic foil substrate are provided. After forming a semiconductor absorber film over the front surface of the metallic foil substrate a back surface of the metallic foil substrate is treated using a material removal process to form a treated back surface in a process chamber. In one embodiment, the material removal process is performed while depositing a transparent conductive layer over the semiconductor absorber film in the process chamber.

摘要翻译： 提供了一种用金属箔基片形成薄膜太阳能电池的系统和方法。 在金属箔基板的前表面上形成半导体吸收膜之后，使用材料去除处理来处理金属箔基板的后表面，以在处理室中形成经处理的后表面。 在一个实施例中，在处理室中的半导体吸收膜上沉积透明导电层的同时进行材料去除处理。

公开(公告)号：US20090266399A1

公开(公告)日：2009-10-29

申请号：US12163162

申请日：2008-06-27

申请人： Bulent M. Basol ,  Mustafa Pinarbasi

发明人： Bulent M. Basol ,  Mustafa Pinarbasi

IPC分类号： H01L31/042 ,  H01L31/00 ,  B29C65/72

CPC分类号： H01L31/03921 ,  H01L31/0322 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521 ,  Y10T156/1041

摘要： Methods of forming thin film solar cells with a metallic substrate are described, as well as solar cells and solar cells strings. The front surface of the metallic substrate is polished to form a polished front surface so that the average roughness of the polished front surface is less than 50 nm. The back surface of the metallic substrate is roughened to form a rough back surface so that the average roughness of the conditioned back surface is more than 500 nm. A Group IBIIIAVIA compound absorber layer is formed over the polished front surface.

摘要翻译： 描述了用金属基底形成薄膜太阳能电池的方法，以及太阳能电池和太阳能电池串。 抛光金属基板的前表面以形成抛光的前表面，使得抛光前表面的平均粗糙度小于50nm。 金属基板的后表面被粗糙化以形成粗糙的背面，使得调理背面的平均粗糙度大于500nm。 在抛光的前表面上形成IBIIIAVIA族复合吸收层。

公开(公告)号：US20090092744A1

公开(公告)日：2009-04-09

申请号：US11868443

申请日：2007-10-05

申请人： Mustafa Pinarbasi ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Bulent M. Basol

IPC分类号： B05D5/12 ,  C23C16/00

CPC分类号： C23C14/24 ,  C23C14/0623 ,  C23C14/562 ,  H01L21/02568 ,  H01L21/02573 ,  H01L21/02614 ,  H01L31/0322 ,  H01L31/0323 ,  H01L31/03923 ,  H01L31/0749 ,  H01L31/1876 ,  Y02E10/541 ,  Y02P70/521

摘要： An evaporation tool for forming a dopant structure on a front surface of a continuous workpiece, wherein the front surface includes a precursor layer to form Group IBIIIAVIA absorbers for solar cells and the dopant structure is used to introduce dopants into the precursor layer. The tool includes at least a first vapor source station to deposit a Group VIA material, such as Se, and a second vapor station to deposit a dopant material, such as Na, onto the continuous workpiece. A moving assembly of the tool holds and moves the continuous workpiece within the tool by feeding the continuous workpiece from a first end and taking up from a second end of the tool. A support assembly of the tool contacts a back surface of the continuous workpiece to remove the heat from and apply tension to the continuous workpiece during the process.

摘要翻译： 一种用于在连续工件的前表面上形成掺杂剂结构的蒸发工具，其中前表面包括前体层，以形成用于太阳能电池的组IBIIIAVIA吸收体，掺杂剂结构用于将掺杂剂引入前体层。 该工具至少包括第一蒸气源站以沉积诸如Se的VIA族材料，以及第二蒸气站，以将诸如Na的掺杂剂材料沉积到连续的工件上。 工具的移动组件通过从第一端馈送连续的工件并从工具的第二端卷取，将连续的工件保持并移动到工具内。 工具的支撑组件接触连续工件的后表面，以在工艺过程中除去热量并向连续工件施加张力。

公开(公告)号：US08771419B2

公开(公告)日：2014-07-08

申请号：US11868443

申请日：2007-10-05

申请人： Mustafa Pinarbasi ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Bulent M. Basol

IPC分类号： C23C16/00

CPC分类号： C23C14/24 ,  C23C14/0623 ,  C23C14/562 ,  H01L21/02568 ,  H01L21/02573 ,  H01L21/02614 ,  H01L31/0322 ,  H01L31/0323 ,  H01L31/03923 ,  H01L31/0749 ,  H01L31/1876 ,  Y02E10/541 ,  Y02P70/521

摘要： An evaporation tool for forming a dopant structure on a front surface of a continuous workpiece, wherein the front surface includes a precursor layer to form Group IBIIIAVIA absorbers for solar cells and the dopant structure is used to introduce dopants into the precursor layer. The tool includes at least a first vapor source station to deposit a Group VIA material, such as Se, and a second vapor station to deposit a dopant material, such as Na, onto the continuous workpiece. A moving assembly of the tool holds and moves the continuous workpiece within the tool by feeding the continuous workpiece from a first end and taking up from a second end of the tool. A support assembly of the tool contacts a back surface of the continuous workpiece to remove the heat from and apply tension to the continuous workpiece during the process.

摘要翻译： 一种用于在连续工件的前表面上形成掺杂剂结构的蒸发工具，其中前表面包括前体层，以形成用于太阳能电池的组IBIIIAVIA吸收体，掺杂剂结构用于将掺杂剂引入前体层。 该工具至少包括第一蒸气源站以沉积诸如Se的VIA族材料，以及第二蒸气站，以将诸如Na的掺杂剂材料沉积到连续的工件上。 工具的移动组件通过从第一端馈送连续的工件并从工具的第二端卷取，将连续的工件保持并移动到工具内。 工具的支撑组件接触连续工件的后表面，以在工艺过程中除去热量并向连续工件施加张力。