发明申请
- 专利标题: PATTERNING OF THIN FILM LAYERS
- 专利标题(中): 薄膜层的图案
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申请号: US12626536申请日: 2009-11-25
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公开(公告)号: US20110043383A1公开(公告)日: 2011-02-24
- 发明人: Sunggu KANG , Lili Huang , Steven Porter Hotelling , John Z. Zhong
- 申请人: Sunggu KANG , Lili Huang , Steven Porter Hotelling , John Z. Zhong
- 主分类号: B05D5/12
- IPC分类号: B05D5/12 ; H03M1/22
摘要:
Simplified patterning of layers of a thin film is disclosed. In some embodiments, the patterning can include patterning a first conductive layer using a patterned dielectric layer as a mask and patterning a second conductive layer using a patterned passivation layer as another mask. In other embodiments, the patterning can include patterning a first conductive layer using a removable photosensitive layer as a mask, patterning a black mask layer using a removable photo mask, and patterning a second conductive layer using a patterned passivation layer as another mask. In still other embodiments, the patterning can include patterning a first conductive layer using a patterned black mask layer as a mask and patterning a second conductive layer using a patterned passivation layer as another mask. An exemplary device utilizing the thin film so patterned can include a touch sensor panel.
公开/授权文献
- US08475872B2 Patterning of thin film layers 公开/授权日:2013-07-02
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