发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 半导体器件及其制造方法
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申请号: US12874894申请日: 2010-09-02
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公开(公告)号: US20110057275A1公开(公告)日: 2011-03-10
- 发明人: Mikio TSUJIUCHI , Yosuke Takeuchi , Kazuyuki Omori , Kenichi Mori
- 申请人: Mikio TSUJIUCHI , Yosuke Takeuchi , Kazuyuki Omori , Kenichi Mori
- 专利权人: RENESAS ELECTRONICS CORPORATION
- 当前专利权人: RENESAS ELECTRONICS CORPORATION
- 优先权: JP2009-205036 20090904
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L21/04
摘要:
To provide a semiconductor device capable of write operation to a selected magnetoresistive element without causing a malfunction of a non-selected magnetoresistive element and a manufacturing method of this semiconductor device. The semiconductor device includes a magnetic storage element having a magnetization free layer whose magnetization direction is made variable and formed over a lead interconnect and a digit line located below the magnetic storage element, extending in a first direction, and capable of changing the magnetization state of the magnetization free layer by the magnetic field generated. The digit line includes an interconnect body portion and a cladding layer covering therewith the bottom surface and the side surface of the interconnect body portion and opened upward. The cladding layer includes a sidewall portion covering therewith the side surface of the interconnect body portion and a bottom wall portion covering therewith the bottom surface of the interconnect body portion. The thickness of the sidewall portion is made greater than that of the bottom wall portion.
公开/授权文献
- US08227880B2 Semiconductor device and manufacturing method thereof 公开/授权日:2012-07-24
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