Invention Application
US20110058418A1 3D NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
有权
3D非易失性存储器件及其制造方法
- Patent Title: 3D NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
- Patent Title (中): 3D非易失性存储器件及其制造方法
-
Application No.: US12781926Application Date: 2010-05-18
-
Publication No.: US20110058418A1Publication Date: 2011-03-10
- Inventor: Won-Joon CHOI , Moon-Sig Joo , Ki-Hong Lee , Beom-Yong Kim , Jun-Yeol Cho , Young-Wook Lee
- Applicant: Won-Joon CHOI , Moon-Sig Joo , Ki-Hong Lee , Beom-Yong Kim , Jun-Yeol Cho , Young-Wook Lee
- Priority: KR10-2009-0084104 20090907
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L29/66 ; H01L21/336

Abstract:
A 3D nonvolatile memory device includes: a plurality of channel structures including a plurality of channel layers and interlayer dielectric layers, which are alternately stacked, and extended in a first direction; a plurality of word lines extended in a second direction at least substantially perpendicular to the first direction; a plurality of row select lines connected to the plurality of channel layers, respectively, and extended in the second direction; and a plurality of column select lines connected to the plurality of channel structures, respectively, and extended in the first direction.
Public/Granted literature
- US08331149B2 3D nonvolatile memory device and method for fabricating the same Public/Granted day:2012-12-11
Information query