发明申请
US20110070728A1 FABRICATION METHOD OF SEMICONDUCTOR DEVICE HAVING CONDUCTIVE BUMPS
有权
具有导电性气泡的半导体器件的制造方法
- 专利标题: FABRICATION METHOD OF SEMICONDUCTOR DEVICE HAVING CONDUCTIVE BUMPS
- 专利标题(中): 具有导电性气泡的半导体器件的制造方法
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申请号: US12956393申请日: 2010-11-30
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公开(公告)号: US20110070728A1公开(公告)日: 2011-03-24
- 发明人: Chun-Chi Ke , Chien-Ping Huang
- 申请人: Chun-Chi Ke , Chien-Ping Huang
- 申请人地址: TW Taichung
- 专利权人: SILICONWARE PRECISION INDUSTRIES CO., LTD.
- 当前专利权人: SILICONWARE PRECISION INDUSTRIES CO., LTD.
- 当前专利权人地址: TW Taichung
- 优先权: TW095149156 20061227
- 主分类号: H01L21/768
- IPC分类号: H01L21/768
摘要:
A semiconductor device having conductive bumps and a fabrication method thereof is proposed. The fabrication method includes the steps of forming a first metallic layer on a substrate having solder pads and a passivation layer formed thereon, and electrically connecting it to the solder pads; applying a second covering layer over exposed parts of the first metallic layer; subsequently, forming a second metallic layer on the second covering layer, and electrically connecting it to the exposed parts of the first metallic layer; applying a third covering layer, and forming openings for exposing parts of the second metallic layer to form thereon a conductive bump having a metallic standoff and a solder material. The covering layers and the metallic layers can provide a buffering effect for effectively absorbing the thermal stress imposed on the conductive bumps to prevent delamination caused by the UBM layers.
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