发明申请
- 专利标题: Full Color Range Interferometric Modulation
- 专利标题(中): 全彩色范围干涉调制
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申请号: US12568522申请日: 2009-09-28
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公开(公告)号: US20110075245A1公开(公告)日: 2011-03-31
- 发明人: Akinori Hashimura , Douglas J. Tweet , Apostolos T. Voutsas
- 申请人: Akinori Hashimura , Douglas J. Tweet , Apostolos T. Voutsas
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.
公开/授权文献
- US07999995B2 Full color range interferometric modulation 公开/授权日:2011-08-16
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