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公开(公告)号：US20120287362A1
公开(公告)日：2012-11-15
申请号：US13558396
申请日：2012-07-26
IPC分类号： G02F1/1335 , G02B27/22 , C23F1/02 , G02B5/30
CPC分类号： B82Y20/00 , G02F1/133528 , G02F2001/133565 , G02F2203/10
摘要： A plasmonic polarizer and a method for fabricating the plasmonic polarizer are provided. The method deposits alternating layers of non-metallic film and metal, forming a stack. A hard mask is formed overlying the stack. The hard mask comprises structures having dimensions and periods between adjacent structures less than a first length, where the first length is equal to (a first wavelength of light/2). The stack is etched through openings in the hard mask to form pillar stacks of alternating non-metallic and metal layers having the dimensions of the hard mask structures. Then, the hard mask structures are removed. In one aspect, subsequent to removing the hard mask structures, the spaces between the pillar stacks are filled with a dielectric material.
摘要翻译： 提供等离子体激元偏振器和制造等离子体激元偏振器的方法。 该方法沉积非金属膜和金属的交替层，形成堆叠。 在叠层上形成硬掩模。 硬掩模包括具有小于第一长度的相邻结构之间的尺寸和周期的结构，其中第一长度等于（第一波长λ/ 2）。 通过硬掩模中的开口蚀刻叠层以形成具有硬掩模结构尺寸的交替的非金属和金属层的柱堆叠。 然后，去除硬掩模结构。 在一个方面，在去除硬掩模结构之后，柱堆叠之间的空间被电介质材料填充。
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2.发明授权公开(公告)号：US08896907B2
公开(公告)日：2014-11-25
申请号：US13449370
申请日：2012-04-18
IPC分类号： G02B26/00 , G02F1/1335
CPC分类号： G02F1/133553 , G02F1/19 , G02F2201/124 , G02F2203/10
摘要： A method is provided for forming a reflective plasmonic display. The method provides a substrate and deposits a bottom dielectric layer. A conductive film is deposited overlying the bottom dielectric layer. A hard mask is formed with nano-size openings overlying the conductive film. The conductive film is plasma etched via nano-size openings in the hard mask, stopping at the dielectric layer. After removing the hard mask, a conductive film is left with nano-size openings to the dielectric layer. Metal is deposited in the nano-size openings, creating a pattern of metallic nanoparticles overlying the dielectric layer. Then, the conductive film is removed. The hard mask may be formed by conformally depositing an Al film overlying the conductive film and anodizing the Al film, creating a hard mask of porous anodized Al oxide (AAO) film. The porous AAO film may form a short-range hexagonal, and long-range random order hole patterns.
摘要翻译： 提供了形成反射等离子体显示器的方法。 该方法提供衬底并沉积底部电介质层。 沉积覆盖在底部介电层上的导电膜。 形成具有覆盖导电膜的纳米尺寸开口的硬掩模。 导电膜通过硬掩模中的纳米尺寸开口进行等离子体蚀刻，停留在电介质层。 在去除硬掩模之后，导电膜留下具有到介电层的纳米尺寸的开口。 金属沉积在纳米尺寸的开口中，形成覆盖在介电层上的金属纳米颗粒图案。 然后，去除导电膜。 硬掩模可以通过共形沉积覆盖在导电膜上的Al膜并阳极氧化Al膜，形成多孔阳极氧化Al氧化物（AAO）膜的硬掩模来形成。 多孔AAO膜可以形成短程六边形和长程随机顺序孔图案。
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3.发明申请Air Stable, Color Tunable Plasmonic Structures for Ultraviolet (UV) and Visible Wavelength Applications 有权空气稳定，紫外（UV）和可见波长应用的颜色可调谐等离子体结构公开(公告)号：US20140168742A1
公开(公告)日：2014-06-19
申请号：US13714073
申请日：2012-12-13
CPC分类号： G02F1/0018 , B82Y20/00 , G02B5/008 , G02F1/133553 , G02F1/1393 , G02F2202/36 , G02F2203/055 , G02F2203/10 , Y10S977/773 , Y10S977/834
摘要： A plasmonic optical device is provided operating in near ultra violet (UV) and visible wavelengths of light. The optical device is made from a substrate and nanoparticles. The nanoparticles have a core with a negative real value relative permittivity of absolute value greater than 10 in a first range of wavelengths including near UV and visible wavelengths of light, and a shell with an imaginary relative permittivity of less than 5 in the first range of wavelengths. A dielectric overlies the substrate, and is embedded with the nanoparticles. If the substrate is reflective, a reflective optical filter is formed. If the substrate is transparent, the filter is transmissive. In one aspect, the dielectric is a tunable medium (e.g., liquid crystal) having an index of refraction responsive to an electric field. The tunable medium is interposed between a first electrode and a second electrode.
摘要翻译： 提供等离子体激发光学器件，其工作在近紫外（UV）和可见光波长的光。 光学器件由衬底和纳米颗粒制成。 所述纳米颗粒具有在包括近紫外和可见光波长的第一波长范围内具有大于10的绝对值的绝对值相对介电常数的核，并且在第一范围内具有小于5的假想相对介电常数的壳 波长。 电介质覆盖在衬底上，并且嵌入有纳米颗粒。 如果基板是反射的，则形成反射式滤光器。 如果基板是透明的，则滤光器是透射的。 在一个方面，电介质是具有响应于电场的折射率的可调介质（例如，液晶）。 可调介质介于第一电极和第二电极之间。
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公开(公告)号：US20140140054A1
公开(公告)日：2014-05-22
申请号：US13682535
申请日：2012-11-20
CPC分类号： C25D11/045 , B01D67/0065 , B01D67/0069 , B01D67/0072 , B01D71/022 , B01D71/025 , B82Y40/00 , C23C14/046 , C23C16/045 , C25D3/44 , C25D3/665 , C25D5/02 , C25D11/022 , C25D11/12 , C25D11/18 , C25D11/20 , C25D11/24
摘要： Methods are provided for fabricating a multi-structure pore membrane. In one method, an anodized aluminum oxide (AAO) template is formed with an array of pores exposing underlying regions of a conductive layer top surface. A plurality of photoresist layers is patterned to sequentially expose a plurality of AAO template sections. Each exposed AAO template section is sequentially etched to widen pore diameters, so that each AAO template section may be associated with a corresponding unique pore diameter. A target material is deposited in the pores of the AAO template and, as a result, an array of target material structures is formed on the top surface, where the target material structures associated with each AAO template section have a corresponding diameter. Also provided is a multi-structure pixel device formed with subpixels having different structure dimensions.
摘要翻译： 提供了制造多结构孔膜的方法。 在一种方法中，阳极氧化的氧化铝（AAO）模板形成有暴露导电层顶表面的下面区域的孔阵列。 图案化多个光致抗蚀剂层以顺序暴露多个AAO模板部分。 依次蚀刻每个曝光的AAO模板部分以扩大孔径，使得每个AAO模板部分可以与相应的唯一孔径相关联。 目标材料沉积在AAO模板的孔中，结果，在顶表面上形成一组目标材料结构，其中与每个AAO模板部分相关联的目标材料结构具有相应的直径。 还提供了具有不同结构尺寸的子像素形成的多结构像素器件。
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公开(公告)号：US07999995B2
公开(公告)日：2011-08-16
申请号：US12568522
申请日：2009-09-28
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.
摘要翻译： 提供全彩色范围的模拟控制干涉式调制装置。 该器件包括透明衬底和具有覆盖衬底的底表面的透明固定位置导电电极。 透明间隔物覆盖固定位置电极，诱导吸收体覆盖在间隔物上。 光反射导电的可移动膜覆盖在诱导的吸收体上。 在诱导的吸收体和具有小于间隔物厚度的最大气隙尺寸的可移动膜之间形成空腔。 在一个方面，从固定位置电极的顶表面到腔下表面的距离至少是腔最大气隙尺寸的两倍。 另一方面，在基板和固定位置电极之间插入至少一个抗反射涂层（ARC）层，并且在固定位置电极和间隔物之间插入至少一个ARC层。
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公开(公告)号：US08767282B2
公开(公告)日：2014-07-01
申请号：US13558396
申请日：2012-07-26
IPC分类号： G02B26/00 , G02B5/30 , G02F1/1335
CPC分类号： B82Y20/00 , G02F1/133528 , G02F2001/133565 , G02F2203/10
摘要： A plasmonic polarizer and a method for fabricating the plasmonic polarizer are provided. The method deposits alternating layers of non-metallic film and metal, forming a stack. A hard mask is formed overlying the stack. The hard mask comprises structures having dimensions and periods between adjacent structures less than a first length, where the first length is equal to (a first wavelength of light/2). The stack is etched through openings in the hard mask to form pillar stacks of alternating non-metallic and metal layers having the dimensions of the hard mask structures. Then, the hard mask structures are removed. In one aspect, subsequent to removing the hard mask structures, the spaces between the pillar stacks are filled with a dielectric material.
摘要翻译： 提供等离子体激元偏振器和制造等离子体激元偏振器的方法。 该方法沉积非金属膜和金属的交替层，形成堆叠。 在叠层上形成硬掩模。 硬掩模包括具有小于第一长度的相邻结构之间的尺寸和周期的结构，其中第一长度等于（第一波长λ/ 2）。 通过硬掩模中的开口蚀刻叠层以形成具有硬掩模结构尺寸的交替的非金属和金属层的柱堆叠。 然后，去除硬掩模结构。 在一个方面，在去除硬掩模结构之后，柱堆叠之间的空间被电介质材料填充。
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7.发明申请公开(公告)号：US20120200817A1
公开(公告)日：2012-08-09
申请号：US13449370
申请日：2012-04-18
IPC分类号： G02F1/1343 , H01B13/00 , B82Y40/00
CPC分类号： G02F1/133553 , G02F1/19 , G02F2201/124 , G02F2203/10
摘要： A method is provided for forming a reflective plasmonic display. The method provides a substrate and deposits a bottom dielectric layer. A conductive film is deposited overlying the bottom dielectric layer. A hard mask is formed with nano-size openings overlying the conductive film. The conductive film is plasma etched via nano-size openings in the hard mask, stopping at the dielectric layer. After removing the hard mask, a conductive film is left with nano-size openings to the dielectric layer. Metal is deposited in the nano-size openings, creating a pattern of metallic nanoparticles overlying the dielectric layer. Then, the conductive film is removed. The hard mask may be formed by conformally depositing an Al film overlying the conductive film and anodizing the Al film, creating a hard mask of porous anodized Al oxide (AAO) film. The porous AAO film may form a short-range hexagonal, and long-range random order hole patterns.
摘要翻译： 提供了形成反射等离子体显示器的方法。 该方法提供衬底并沉积底部电介质层。 沉积覆盖在底部介电层上的导电膜。 形成具有覆盖导电膜的纳米尺寸开口的硬掩模。 导电膜通过硬掩模中的纳米尺寸开口进行等离子体蚀刻，停留在电介质层。 在去除硬掩模之后，导电膜留下具有到介电层的纳米尺寸的开口。 金属沉积在纳米尺寸的开口中，形成覆盖在介电层上的金属纳米颗粒图案。 然后，去除导电膜。 硬掩模可以通过共形沉积覆盖在导电膜上的Al膜并阳极氧化Al膜，形成多孔阳极氧化Al氧化物（AAO）膜的硬掩模来形成。 多孔AAO膜可以形成短程六边形和长程随机顺序孔图案。
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公开(公告)号：US20110075245A1
公开(公告)日：2011-03-31
申请号：US12568522
申请日：2009-09-28
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.
摘要翻译： 提供全色范围的模拟控制干涉式调制装置。 该器件包括透明衬底和具有覆盖衬底的底表面的透明固定位置导电电极。 透明间隔物覆盖固定位置电极，诱导吸收体覆盖在间隔物上。 光反射导电的可移动膜覆盖在诱导的吸收体上。 在诱导的吸收体和具有小于间隔物厚度的最大气隙尺寸的可移动膜之间形成空腔。 在一个方面，从固定位置电极的顶表面到腔下表面的距离至少是腔最大气隙尺寸的两倍。 另一方面，在基板和固定位置电极之间插入至少一个抗反射涂层（ARC）层，并且在固定位置电极和间隔物之间插入至少一个ARC层。
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公开(公告)号：US08503064B2
公开(公告)日：2013-08-06
申请号：US13157225
申请日：2011-06-09
IPC分类号： G02B26/00
CPC分类号： G02F1/0128 , G02F1/13338 , G02F1/19 , G02F2001/13345 , G02F2203/10 , G02F2203/34 , G06F3/0412
摘要： An electrical pressure-sensitive reflective display includes an array of display pixels, each with a transparent top surface, first electrode, second electrode, an elastic polymer medium, and metallic nanoparticles distributed in the elastic polymer medium. When a first voltage potential is applied between the first and second electrodes of each display pixel, a first color is reflected from the incident spectrum of light, assuming no pressure is applied on the top surface of each display pixel. When the top surface of a first display pixel is deformed in response to an applied pressure, the elastic polymer medium in the first display pixel is compressed, decreasing the metallic nanoparticle-to-metallic nanoparticle mean distance in the first display pixel. In response to decreasing the metallic nanoparticle-to-metallic nanoparticle mean distance, the color reflected from the incident spectrum of light by the second display pixel is changed from the first color to second color.
摘要翻译： 电压敏反射显示器包括显示像素阵列，每个显示像素具有分布在弹性聚合物介质中的透明顶表面，第一电极，第二电极，弹性聚合物介质和金属纳米颗粒。 当在每个显示像素的第一和第二电极之间施加第一电压电位时，假设在每个显示像素的顶表面上没有施加压力，第一颜色从光的入射光谱反射。 当第一显示像素的顶表面响应于所施加的压力而变形时，第一显示像素中的弹性聚合物介质被压缩，从而降低第一显示像素中金属纳米颗粒与金属纳米颗粒的平均距离。 响应于减少金属纳米颗粒 - 金属纳米颗粒平均距离，由第二显示像素的入射光谱反射的颜色从第一颜色变为第二颜色。
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10.发明授权公开(公告)号：US08045107B2
公开(公告)日：2011-10-25
申请号：US12614368
申请日：2009-11-06
IPC分类号： G02F1/1335 , G02B26/00 , H01L21/00
CPC分类号： G02F1/195 , G02F2203/10
摘要： A color-tunable plasmonic device is provided with a partially modulated refractive index. A first dielectric layer overlies a bottom electrode, and has a refractive index non-responsive to an electric field. A second dielectric layer overlies the first dielectric layer, having a refractive index responsive to an electric field. An electrically conductive top electrode overlies the second dielectric layer. A plasmonic layer including a plurality of discrete plasmonic particles is interposed between the top and bottom electrodes. In one aspect, the plasmonic layer is interposed between the first and second dielectric layers. In a second aspect, the plasmonic layer is interposed between the first dielectric layer and the bottom electrode. In a third aspect, a first plasmonic layer is interposed between the first dielectric layer and the bottom electrode, and a second plasmonic layer of discrete plasmonic particles is interposed between the first dielectric layer and the second dielectric layer.
摘要翻译： 彩色等离子体激元器件具有部分调制的折射率。 第一电介质层覆盖在底部电极上，并且具有对电场无响应的折射率。 第二电介质层覆盖第一电介质层，具有响应于电场的折射率。 导电顶电极覆盖在第二电介质层上。 包括多个离散等离子体激元的等离子体激元层插入在顶部和底部电极之间。 在一个方面，等离子体激元层介于第一和第二电介质层之间。 在第二方面，等离子体激元层介于第一介电层和底电极之间。 在第三方面中，在第一介电层和底电极之间插入第一等离子体激元层，并且在第一介电层和第二电介质层之间插入离散等离子体激元的第二等离子体层。
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