发明申请
US20110079837A1 CAPACITOR, METHOD OF INCREASING A CAPACITANCE AREA OF SAME, AND SYSTEM CONTAINING SAME 有权
电容器,增加其电容区域的方法和包含该电容器的系统

CAPACITOR, METHOD OF INCREASING A CAPACITANCE AREA OF SAME, AND SYSTEM CONTAINING SAME
摘要:
A capacitor includes a substrate (110, 210), a first electrically insulating layer (120, 220) over the substrate, and a fin (130, 231) including a semiconducting material (135) over the first electrically insulating layer. A first electrically conducting layer (140, 810) is located over the first electrically insulating layer and adjacent to the fin. A second electrically insulating layer (150, 910) is located adjacent to the first electrically conducting layer, and a second electrically conducting layer (160, 1010) is located adjacent to the second electrically insulating layer. The first and second electrically conducting layers together with the second electrically insulating layer form a metal-insulator-metal stack that greatly increases the capacitance area of the capacitor. In one embodiment the capacitor is formed using what may be referred to as a removable metal gate (RMG) approach.
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