Capacitor, method of increasing a capacitance area of same, and system containing same
    1.
    发明授权
    Capacitor, method of increasing a capacitance area of same, and system containing same 有权
    电容器,增加电容面积相同的方法,以及包含其的系统

    公开(公告)号:US08138042B2

    公开(公告)日:2012-03-20

    申请号:US12967238

    申请日:2010-12-14

    IPC分类号: H01L27/108

    摘要: A capacitor includes a substrate (110, 210), a first electrically insulating layer (120, 220) over the substrate, and a fin (130, 231) including a semiconducting material (135) over the first electrically insulating layer. A first electrically conducting layer (140, 810) is located over the first electrically insulating layer and adjacent to the fin. A second electrically insulating layer (150, 910) is located adjacent to the first electrically conducting layer, and a second electrically conducting layer (160, 1010) is located adjacent to the second electrically insulating layer. The first and second electrically conducting layers together with the second electrically insulating layer form a metal-insulator-metal stack that greatly increases the capacitance area of the capacitor. In one embodiment the capacitor is formed using what may be referred to as a removable metal gate (RMG) approach.

    摘要翻译: 电容器包括衬底(110,210),在衬底上方的第一电绝缘层(120,220)以及在第一电绝缘层上包括半导体材料(135)的翅片(130,231)。 第一导电层(140,810)位于第一电绝缘层上并且邻近鳍片。 第二电绝缘层(150,910)位于第一导电层附近,并且第二导电层(160,1010)位于第二电绝缘层附近。 第一和第二导电层与第二电绝缘层一起形成金属 - 绝缘体 - 金属叠层,其大大增加了电容器的电容面积。 在一个实施例中,使用可被称为可拆卸金属门(RMG)方法形成电容器。

    CAPACITOR, METHOD OF INCREASING A CAPACITANCE AREA OF SAME, AND SYSTEM CONTAINING SAME
    4.
    发明申请
    CAPACITOR, METHOD OF INCREASING A CAPACITANCE AREA OF SAME, AND SYSTEM CONTAINING SAME 有权
    电容器,增加其电容区域的方法和包含该电容器的系统

    公开(公告)号:US20110079837A1

    公开(公告)日:2011-04-07

    申请号:US12967238

    申请日:2010-12-14

    IPC分类号: H01L27/108 H01L21/8242

    摘要: A capacitor includes a substrate (110, 210), a first electrically insulating layer (120, 220) over the substrate, and a fin (130, 231) including a semiconducting material (135) over the first electrically insulating layer. A first electrically conducting layer (140, 810) is located over the first electrically insulating layer and adjacent to the fin. A second electrically insulating layer (150, 910) is located adjacent to the first electrically conducting layer, and a second electrically conducting layer (160, 1010) is located adjacent to the second electrically insulating layer. The first and second electrically conducting layers together with the second electrically insulating layer form a metal-insulator-metal stack that greatly increases the capacitance area of the capacitor. In one embodiment the capacitor is formed using what may be referred to as a removable metal gate (RMG) approach.

    摘要翻译: 电容器包括衬底(110,210),在衬底上方的第一电绝缘层(120,220)以及在第一电绝缘层上包括半导体材料(135)的翅片(130,231)。 第一导电层(140,810)位于第一电绝缘层上并且邻近鳍片。 第二电绝缘层(150,910)位于第一导电层附近,并且第二导电层(160,1010)位于第二电绝缘层附近。 第一和第二导电层与第二电绝缘层一起形成金属 - 绝缘体 - 金属叠层,其大大增加了电容器的电容面积。 在一个实施例中,使用可被称为可拆卸金属门(RMG)方法形成电容器。