发明申请
- 专利标题: ADDITIONAL METAL ROUTING IN SEMICONDUCTOR DEVICES
- 专利标题(中): 半导体器件中的附加金属布线
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申请号: US12972232申请日: 2010-12-17
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公开(公告)号: US20110086470A1公开(公告)日: 2011-04-14
- 发明人: Terry McDaniel , James Green , Mark Fischer
- 申请人: Terry McDaniel , James Green , Mark Fischer
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L21/8229
- IPC分类号: H01L21/8229
摘要:
Memory devices, such as DRAM memory devices, may include one or more metal layers above a local interconnect of the DRAM memory that make contact to lower gate regions of the memory device. As the size of semiconductor components decreases and circuit densities increase, the density of the metal routing in these upper metal layers becomes increasingly difficult to fabricate. By providing additional metal routing in the lower gate regions that may be coupled to the upper metal layers, the spacing requirements of the upper metal layers may be eased, while maintaining the size of the semiconductor device. In addition, the additional metal routing formed in the gate regions of the memory devices may be disposed parallel to other metal contacts in a strapping configuration, thus reducing a resistance of the metal contacts, such as buried digit lines of a DRAM memory cell.
公开/授权文献
- US08674404B2 Additional metal routing in semiconductor devices 公开/授权日:2014-03-18
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