发明申请
- 专利标题: Method for Fracturing a Pattern for Writing with a Shaped Charged Particle Beam Writing System Using Dragged Shots
- 专利标题(中): 用成形的带电粒子束写入系统使用拖曳射击压缩图案的方法
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申请号: US12603580申请日: 2009-10-21
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公开(公告)号: US20110089344A1公开(公告)日: 2011-04-21
- 发明人: Akira Fujimura , Harold Robert Zable , Michael Tucker
- 申请人: Akira Fujimura , Harold Robert Zable , Michael Tucker
- 申请人地址: US CA San Jose
- 专利权人: D2S, INC.
- 当前专利权人: D2S, INC.
- 当前专利权人地址: US CA San Jose
- 主分类号: G21K5/10
- IPC分类号: G21K5/10 ; H01J37/08
摘要:
In the field of semiconductor production using shaped charged particle beam lithography, a method and system for fracturing or mask data preparation or proximity effect correction is disclosed, wherein a shot determined for a shaped charged particle beam writer system comprises dragging the charged particle beam across a surface during the shot, so as to form a complex pattern in a single, extended shot. The dragging may be done with either variable shaped beam (VSB) or character projection (CP) shots. Methods for specifying in the shot data the path for the dragged shot are also disclosed. Other embodiments include using dragged shots with partial projection, varying the dragging velocity during a shot, and combining dragged shots with conventional shots. A method and system for creating glyphs which contain dragged shots is also disclosed.
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