发明申请
US20110091810A1 COMPOUND, DISSOLUTION INHIBITOR, POSITIVE TYPE RESIST COMPOSITION, AND METHOD OF FORMING RESIST PATTERN
失效
化合物,溶解抑制剂,积极类型抗蚀剂组合物和形成耐药性图案的方法
- 专利标题: COMPOUND, DISSOLUTION INHIBITOR, POSITIVE TYPE RESIST COMPOSITION, AND METHOD OF FORMING RESIST PATTERN
- 专利标题(中): 化合物,溶解抑制剂,积极类型抗蚀剂组合物和形成耐药性图案的方法
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申请号: US12980914申请日: 2010-12-29
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公开(公告)号: US20110091810A1公开(公告)日: 2011-04-21
- 发明人: Daiju SHIONO , Taku Hirayama , Toshiyuki OGATA , Shogo MATSUMARU , Hideo HADA
- 申请人: Daiju SHIONO , Taku Hirayama , Toshiyuki OGATA , Shogo MATSUMARU , Hideo HADA
- 申请人地址: JP Kawasaki-shi
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2005-118724 20050415; JP2005-298385 20051013
- 主分类号: G03F7/004
- IPC分类号: G03F7/004
摘要:
A positive type resist composition for forming a high resolution resist pattern and a method of forming a resist pattern are provided which use a low-molecular-weight material as a base component, and a compound and a dissolution inhibitor that are each suitable for the positive type resist composition. Here, the compound is a non-polymer having a molecular weight of 500 to 3000, and is decomposed under the action of an acid to produce two or more molecules of a decomposition product having a molecular weight of 200 or more; the dissolution inhibitor comprises the compound; the positive type resist composition comprises the compound and the acid generator component; and the method of forming a resist pattern uses the positive type resist composition.
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