发明申请
- 专利标题: CONDUCTIVE FILM, METHOD OF MANUFACTURING THE SAME, SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 导电膜,其制造方法,半导体器件及其制造方法
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申请号: US12908943申请日: 2010-10-21
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公开(公告)号: US20110095433A1公开(公告)日: 2011-04-28
- 发明人: Michio HORIUCHI , Yasue TOKUTAKE , Yuichi MATSUDA , Tsuyoshi KOBAYASHI , Tatsuaki DENDA
- 申请人: Michio HORIUCHI , Yasue TOKUTAKE , Yuichi MATSUDA , Tsuyoshi KOBAYASHI , Tatsuaki DENDA
- 申请人地址: JP Nagano-shi
- 专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人地址: JP Nagano-shi
- 优先权: JP2009-243030 20091022
- 主分类号: H01L23/535
- IPC分类号: H01L23/535 ; H05K1/02 ; H01L21/768 ; B05D5/12
摘要:
There is provided a method of manufacturing a conductive film. The method includes: (a) providing an anodized layer having a plurality of through holes extending therethrough in its thickness direction; (b) forming a plurality of linear conductors by filling each of the through holes with a conductive material; (c) forming protection layers on both surfaces of the anodized layer; (d) removing the anodized layer to form a plurality of gaps between the linear conductors; (e) forming an organic insulation layer between the protection layers to fill the gaps with the organic insulation layer; and (f) removing the protection layers.
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