Invention Application
- Patent Title: APPARATUS AND METHOD FOR PLATING A SUBSTRATE
- Patent Title (中): 用于涂覆基材的装置和方法
-
Application No.: US12938797Application Date: 2010-11-03
-
Publication No.: US20110108415A1Publication Date: 2011-05-12
- Inventor: UIHYOUNG LEE , Namseog Kim , WoonHo Seo , Min-Suk Han , YoungHyun Ju , Ju-il Choi
- Applicant: UIHYOUNG LEE , Namseog Kim , WoonHo Seo , Min-Suk Han , YoungHyun Ju , Ju-il Choi
- Priority: KR10-2009-0108237 20091110
- Main IPC: C25D17/00
- IPC: C25D17/00

Abstract:
An apparatus for electroplating a substrate includes a substrate supporting member that supports the substrate such that a plating surface of the substrate faces upwardly, an anode electrode disposed at an upper part of the substrate supporting member, a power source for applying a voltage to the anode electrode and the substrate, and a plating solution supply member for supplying a plating solution onto the substrate.
Information query