Invention Application
US20110108415A1 APPARATUS AND METHOD FOR PLATING A SUBSTRATE 审中-公开
用于涂覆基材的装置和方法

APPARATUS AND METHOD FOR PLATING A SUBSTRATE
Abstract:
An apparatus for electroplating a substrate includes a substrate supporting member that supports the substrate such that a plating surface of the substrate faces upwardly, an anode electrode disposed at an upper part of the substrate supporting member, a power source for applying a voltage to the anode electrode and the substrate, and a plating solution supply member for supplying a plating solution onto the substrate.
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