发明申请
- 专利标题: LASER PROCESSING METHOD
- 专利标题(中): 激光加工方法
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申请号: US12907349申请日: 2010-10-19
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公开(公告)号: US20110108532A1公开(公告)日: 2011-05-12
- 发明人: Kosuke Kurachi , Masahiko Kubota , Akihiko Okano , Atsushi Hiramoto
- 申请人: Kosuke Kurachi , Masahiko Kubota , Akihiko Okano , Atsushi Hiramoto
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-255897 20091109
- 主分类号: B23K26/38
- IPC分类号: B23K26/38
摘要:
Provided is a laser processing method capable of improving precision of a processing shape and degree of freedom of the processing shape. When a recess portion is formed in a substrate (W) which is an object to be processed, an inner portion of the substrate (W) is scanned with a condensing point (LS1) of modification laser light (L1) which is first laser light to form a modified layer (Wr) which becomes a boundary of a laser processing region (R1) in a position corresponding to a bottom part of the recess portion (modified layer forming step). Next, a surface (Wa) of the substrate (W) is irradiated with condensed processing laser light which is second laser light to remove and process the laser processing region (R1) defined by the modified layer (Wr), to thereby form the recess portion (removing/processing step).
公开/授权文献
- US08829391B2 Laser processing method 公开/授权日:2014-09-09
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