公开(公告)号：US20110108532A1

公开(公告)日：2011-05-12

申请号：US12907349

申请日：2010-10-19

申请人： Kosuke Kurachi ,  Masahiko Kubota ,  Akihiko Okano ,  Atsushi Hiramoto

发明人： Kosuke Kurachi ,  Masahiko Kubota ,  Akihiko Okano ,  Atsushi Hiramoto

IPC分类号： B23K26/38

CPC分类号： B23K26/18 ,  B23K26/361 ,  B23K26/40 ,  B23K26/53 ,  B23K26/60 ,  B23K2103/50 ,  H01L21/268

摘要： Provided is a laser processing method capable of improving precision of a processing shape and degree of freedom of the processing shape. When a recess portion is formed in a substrate (W) which is an object to be processed, an inner portion of the substrate (W) is scanned with a condensing point (LS1) of modification laser light (L1) which is first laser light to form a modified layer (Wr) which becomes a boundary of a laser processing region (R1) in a position corresponding to a bottom part of the recess portion (modified layer forming step). Next, a surface (Wa) of the substrate (W) is irradiated with condensed processing laser light which is second laser light to remove and process the laser processing region (R1) defined by the modified layer (Wr), to thereby form the recess portion (removing/processing step).

摘要翻译： 提供了能够提高加工形状的精度和加工形状的自由度的激光加工方法。 当在作为被加工物的基板（W）上形成有凹部时，用作为第一激光的变形激光（L1）的聚光点（LS1）扫描基板（W）的内部， 形成在与凹部（修饰层形成工序）的底部对应的位置成为激光加工区域（R1）的边界的改质层（Wr）。 接下来，用作为第二激光的聚光处理用激光照射基板（W）的表面（Wa），以去除并处理由改性层（Wr）限定的激光加工区域（R1），从而形成凹部 部分（去除/处理步骤）。

公开(公告)号：US08829391B2

公开(公告)日：2014-09-09

申请号：US12907349

申请日：2010-10-19

申请人： Kosuke Kurachi ,  Masahiko Kubota ,  Akihiko Okano ,  Atsushi Hiramoto

发明人： Kosuke Kurachi ,  Masahiko Kubota ,  Akihiko Okano ,  Atsushi Hiramoto

IPC分类号： B23K26/42 ,  B23K26/40 ,  B23K26/18 ,  B23K26/36 ,  H01L21/268 ,  B23K26/00

CPC分类号： B23K26/18 ,  B23K26/361 ,  B23K26/40 ,  B23K26/53 ,  B23K26/60 ,  B23K2103/50 ,  H01L21/268

摘要： A laser processing method of processing an object to be processed. The object to be processed has a modified portion and a non-modified portion. A modified layer forming step forms a modified layer of the object to be processed by scanning an inner portion of the object with a condensing point of first laser light. The modified layer (i) has a processing speed with second laser light that is lower than a processing speed of a non-modified portion and (ii) is formed below the non-modified portion. A removing step removes a portion of the non-modified portion. The portion of the non-modified portion ranges from a surface of the object to the modified layer. The removing step includes irradiating the portion of the non-modified portion with the second laser light.

摘要翻译： 一种处理被处理物体的激光加工方法。 待处理对象具有修改部分和未修改部分。 改性层形成步骤通过用第一激光的聚光点扫描物体的内部来形成被处理物体的改性层。 改性层（i）的处理速度与第二激光的处理速度相比低于非变形部的处理速度，（ii）形成在非变形部的下方。 去除步骤去除未修饰部分的一部分。 未改性部分的部分从物体的表面到改性层的范围。 去除步骤包括用第二激光照射非改性部分的部分。

公开(公告)号：US20090277887A1

公开(公告)日：2009-11-12

申请号：US12430394

申请日：2009-04-27

申请人： Kosuke Kurachi

发明人： Kosuke Kurachi

IPC分类号： B23K26/20

CPC分类号： B23K26/24 ,  B23K26/206 ,  H01J9/261

摘要： Provided is a manufacturing method for an airtight container excelling in airtightness and adhesion and having small stress. An area where temperature easily rises compared to an area adjacent to an area of a part of a joint member and capable of melting the adjacent area by laser beam irradiation is provided in the area of a part of the joint member, and the laser beam irradiation is started therefrom.

摘要翻译： 提供了一种气密性容器的制造方法，其气密性和粘合性优异，应力小。 在接合部件的一部分的区域设置有与接合部件的一部分的区域相邻的区域，通过激光束照射能够熔融相邻区域的温度容易上升的区域，激光束照射 从那里开始。

公开(公告)号：US20090199963A1

公开(公告)日：2009-08-13

申请号：US12361837

申请日：2009-01-29

申请人： Yasuo Ohashi ,  Tomonori Nakazawa ,  Kosuke Kurachi ,  Masahiro Tagawa ,  Mitsutoshi Hasegawa

发明人： Yasuo Ohashi ,  Tomonori Nakazawa ,  Kosuke Kurachi ,  Masahiro Tagawa ,  Mitsutoshi Hasegawa

IPC分类号： B32B37/00 ,  H01J9/26

CPC分类号： H01J9/261

摘要： An airtight container manufacturing method capable of effectively utilizing an energy beam and improving a “takt time” as acquiring desired bonding intensity is provided. That is, a first bonding material is arranged between a first plate structure and a frame, a second bonding material is arranged between a second plate structure and the frame. The energy beam is irradiated to the first bonding material through the first plate structure to bond the first plate structure and the frame. The energy beam is irradiated to the second bonding material through the frame so that the beam transmits through the first plate structure and the surface of the frame on the side of the first plate structure, to bond the second plate structure and the frame. Such bonding processes are performed after an arrangement step.

摘要翻译： 提供了一种能够有效利用能量束并提高“节拍时间”以获得期望的接合强度的气密容器制造方法。 也就是说，第一接合材料布置在第一板结构和框架之间，第二接合材料布置在第二板结构和框架之间。 能量束通过第一板结构照射到第一接合材料，以将第一板结构和框架结合。 能量束通过框架照射到第二接合材料，使得光束在第一板结构侧通过第一板结构和框架的表面，以将第二板结构和框架结合。 这样的接合处理在布置步骤之后进行。

公开(公告)号：US20100112890A1

公开(公告)日：2010-05-06

申请号：US12609943

申请日：2009-10-30

申请人： Nobuhiro Ito ,  Yasuo Ohashi ,  Kosuke Kurachi ,  Masahiro Tagawa

发明人： Nobuhiro Ito ,  Yasuo Ohashi ,  Kosuke Kurachi ,  Masahiro Tagawa

IPC分类号： H01J9/26

CPC分类号： H01J29/86 ,  H01J9/241 ,  H01J9/261 ,  H01J31/127 ,  H01J2211/446 ,  Y10T29/49703

摘要： A method for producing an airtight container includes preparing an assembly having a first substrate and a frame member, the first substrate having an electron-emitting element formed on a first surface thereof, the frame member mounted on the first surface outside an area where the electron-emitting element is formed; forming a temporary assembly having the assembly and a second substrate by bringing the second substrate into contact with the frame member via a joining member such that an inner space is formed; melting the joining member by irradiating the joining member with a laser beam transmitted through the second substrate; and solidifying the melted joining member. The laser beam is applied such that an incident direction at an irradiation position on the joining member does not include components toward the interior of the frame member while the laser beam moves relative to the temporary assembly.

摘要翻译： 一种密封容器的制造方法，其特征在于，准备具有第一基板和框架部件的组装体，所述第一基板在其第一面上形成有电子发射元件，所述框架部件安装在所述第一面上， 形成元件; 通过使所述第二基板经由接合构件与所述框架构件接触而形成具有所述组件的临时组件和第二基板，使得形成内部空间; 通过用透射通过第二基板的激光束照射接合部件来熔化接合部件; 并使熔融的接合部件固化。 激光束被施加使得当激光束相对于临时组件移动时，接合构件上的照射位置处的入射方向不包括朝向框架构件的内部的部件。

公开(公告)号：US08641858B2

公开(公告)日：2014-02-04

申请号：US12361837

申请日：2009-01-29

申请人： Yasuo Ohashi ,  Tomonori Nakazawa ,  Kosuke Kurachi ,  Masahiro Tagawa ,  Mitsutoshi Hasegawa

发明人： Yasuo Ohashi ,  Tomonori Nakazawa ,  Kosuke Kurachi ,  Masahiro Tagawa ,  Mitsutoshi Hasegawa

IPC分类号： B29C65/00

CPC分类号： H01J9/261

摘要： A manufacturing method provides an airtight container having a first plate structure, a second plate structure having a wiring formed on a surface facing the first plate structure, a frame arranged between the first plate structure and the second plate structure, a first bonding material arranged between the first plate structure and the frame, and a second bonding material arranged between the second plate structure and the frame. The method includes the steps of bonding the first plate structure and the frame by irradiating a first energy beam to the first bonding material by transmitting the first energy beam through the first plate structure, and bonding the second plate structure and the frame by irradiating a second energy beam to the second bonding material by transmitting the second energy beam through the first plate structure and the frame. The first energy beam and the second energy beam are scanned in close proximity to each other and at the same speed.

摘要翻译： 一种制造方法，提供一种具有第一板结构的气密容器，具有形成在面向第一板结构的表面上的布线的第二板结构，布置在第一板结构和第二板结构之间的框架， 第一板结构和框架，以及布置在第二板结构和框架之间的第二接合材料。 该方法包括以下步骤：通过将第一能量束透射穿过第一板结构，将第一能量束照射到第一接合材料，并将第二板结构和框架照射第二板结构和框架 通过将第二能量束透过第一板结构和框架将能量束传递到第二接合材料。 第一能量束和第二能量束以相同的速度彼此靠近地扫描。

公开(公告)号：US20120021664A1

公开(公告)日：2012-01-26

申请号：US13248856

申请日：2011-09-29

申请人： Nobuhiro Ito ,  Yasuo Ohashi ,  Kosuke Kurachi ,  Masahiro Tagawa

发明人： Nobuhiro Ito ,  Yasuo Ohashi ,  Kosuke Kurachi ,  Masahiro Tagawa

IPC分类号： H01J9/26

CPC分类号： H01J29/86 ,  H01J9/241 ,  H01J9/261 ,  H01J31/127 ,  H01J2211/446 ,  Y10T29/49703

摘要： A method for producing an airtight container includes preparing an assembly having a first substrate and a frame member, the first substrate having an electron-emitting element formed on a first surface thereof, the frame member mounted on the first surface outside an area where the electron-emitting element is formed; forming a temporary assembly having the assembly and a second substrate by bringing the second substrate into contact with the frame member via a joining member such that an inner space is formed; melting the joining member by irradiating the joining member with a laser beam transmitted through the second substrate; and solidifying the melted joining member. The laser beam is applied such that an incident direction at an irradiation position on the joining member does not include components toward the interior of the frame member while the laser beam moves relative to the temporary assembly.

摘要翻译： 一种密封容器的制造方法，其特征在于，准备具有第一基板和框架部件的组装体，所述第一基板在其第一面上形成有电子发射元件，所述框架部件安装在所述第一面上， 形成元件; 通过使所述第二基板经由接合构件与所述框架构件接触而形成具有所述组件的临时组件和第二基板，使得形成内部空间; 通过用透射通过第二基板的激光束照射接合构件来熔化接合构件; 并使熔融的接合部件固化。 激光束被施加使得当激光束相对于临时组件移动时，接合构件上的照射位置处的入射方向不包括朝向框架构件的内部的部件。

公开(公告)号：US20090120915A1

公开(公告)日：2009-05-14

申请号：US12264408

申请日：2008-11-04

申请人： Masahiro Tagawa ,  Kosuke Kurachi ,  Nobuhiro Ito ,  Akihiro Kimura ,  Yasuo Ohashi

发明人： Masahiro Tagawa ,  Kosuke Kurachi ,  Nobuhiro Ito ,  Akihiro Kimura ,  Yasuo Ohashi

IPC分类号： B23K26/08 ,  B65B51/10 ,  B23K26/32

CPC分类号： B23K26/034 ,  B23K26/032 ,  B23K26/0608 ,  B23K26/0676 ,  B23K26/206 ,  C03C27/06 ,  H01L23/10 ,  H01L2924/0002 ,  H01L2924/12044 ,  H01L2924/00

摘要： A laser beam emitted from a laser oscillator unit passes through a first substrate and irradiates a sealing member. The sealing member irradiated with the laser beam is heated in accordance with the absorptance and thus softens and melts. The laser beam is reflected by the sealing member and the reflection reaches a detector unit. A computing unit transmits information, such as a correction value of the laser power, to a laser controlling unit on the basis of the information from the detector unit so that the melting state of the surface of the sealing member is kept constant. In this manner, the melting state of the sealing material can be maintained in an appropriate state.

摘要翻译： 从激光振荡器单元发射的激光束通过第一基板并照射密封构件。 用激光束照射的密封构件根据吸收率被加热，从而软化并熔融。 激光束被密封件反射并且反射到达检测器单元。 计算单元基于来自检测器单元的信息将诸如激光功率的校正值的信息发送到激光控制单元，使得密封构件的表面的熔化状态保持恒定。 以这种方式，可以将密封材料的熔化状态保持在适当的状态。

公开(公告)号：US08057273B2

公开(公告)日：2011-11-15

申请号：US12609943

申请日：2009-10-30

申请人： Nobuhiro Ito ,  Yasuo Ohashi ,  Kosuke Kurachi ,  Masahiro Tagawa

发明人： Nobuhiro Ito ,  Yasuo Ohashi ,  Kosuke Kurachi ,  Masahiro Tagawa

IPC分类号： H01J9/26 ,  H01J9/32

CPC分类号： H01J29/86 ,  H01J9/241 ,  H01J9/261 ,  H01J31/127 ,  H01J2211/446 ,  Y10T29/49703

摘要： A method for producing an airtight container includes preparing an assembly having a first substrate and a frame member, the first substrate having an electron-emitting element formed on a first surface thereof, the frame member mounted on the first surface outside an area where the electron-emitting element is formed; forming a temporary assembly having the assembly and a second substrate by bringing the second substrate into contact with the frame member via a joining member such that an inner space is formed; melting the joining member by irradiating the joining member with a laser beam transmitted through the second substrate; and solidifying the melted joining member. The laser beam is applied such that an incident direction at an irradiation position on the joining member does not include components toward the interior of the frame member while the laser beam moves relative to the temporary assembly.

摘要翻译： 一种密封容器的制造方法，其特征在于，准备具有第一基板和框架部件的组装体，所述第一基板在其第一面上形成有电子发射元件，所述框架部件安装在所述第一面上， 形成元件; 通过使所述第二基板经由接合构件与所述框架构件接触而形成具有所述组件的临时组件和第二基板，使得形成内部空间; 通过用透射通过第二基板的激光束照射接合构件来熔化接合构件; 并使熔融的接合部件固化。 激光束被施加使得当激光束相对于临时组件移动时，接合构件上的照射位置处的入射方向不包括朝向框架构件的内部的部件。