Invention Application
- Patent Title: MEMS MIRROR SYSTEM FOR LASER PRINTING APPLICATIONS
- Patent Title (中): 用于激光打印应用的MEMS镜面系统
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Application No.: US13009964Application Date: 2011-01-20
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Publication No.: US20110111544A1Publication Date: 2011-05-12
- Inventor: Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
- Applicant: Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
- Applicant Address: US CA Santa Clara
- Assignee: Miradia Inc.
- Current Assignee: Miradia Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/02
- IPC: H01L21/02
Abstract:
A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
Public/Granted literature
- US08361331B2 MEMS mirror system for laser printing applications Public/Granted day:2013-01-29
Information query
IPC分类:
