-
公开(公告)号：US20110111544A1
公开(公告)日：2011-05-12
申请号：US13009964
申请日：2011-01-20
申请人： Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
发明人： Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
IPC分类号： H01L21/02
CPC分类号： G02B26/0841 , B41J2/471 , G02B26/105
摘要： A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
摘要翻译： 用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底，以及提供可移动到衬底和电极上的反射镜。 施加到电极的电压产生静电力，导致反射镜的一端被吸引到基板。 可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。
-
2.发明授权Projection display system including a high fill ratio silicon spatial light modulator 有权投影显示系统包括高填充率硅空间光调制器公开(公告)号：US07453624B2
公开(公告)日：2008-11-18
申请号：US11448537
申请日：2006-06-05
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
摘要翻译： 显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。 显示系统还包括位于照明路径中的空间光调制器。 空间光调制器包括包括多个电极器件和耦合到半导体衬底的铰链结构的半导体衬底。 铰链结构包括硅材料。 空间光调制器还包括耦合到铰链结构并且延伸到半导体衬底预定距离的镜柱和耦合到镜柱并且覆盖多个电极器件的镜板。 显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。
-
公开(公告)号：US08361331B2
公开(公告)日：2013-01-29
申请号：US13009964
申请日：2011-01-20
申请人： Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
发明人： Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
IPC分类号： B29D11/00 , H01L21/302
CPC分类号： G02B26/0841 , B41J2/471 , G02B26/105
摘要： A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
摘要翻译： 用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底，以及提供可移动到衬底和电极上的反射镜。 施加到电极的电压产生静电力，导致反射镜的一端被吸引到基板。 可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。
-
公开(公告)号：US07898561B2
公开(公告)日：2011-03-01
申请号：US12019822
申请日：2008-01-25
申请人： Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
发明人： Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
IPC分类号： B41J2/47
CPC分类号： G02B26/0841 , B41J2/471 , G02B26/105
摘要： A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
摘要翻译： 用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底，以及提供可移动到衬底和电极上的反射镜。 施加到电极的电压产生静电力，导致反射镜的一端被吸引到基板。 可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。
-
5.发明申请PROJECTION DISPLAY SYSTEM INCLUDING A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 审中-公开投影显示系统，包括高比例硅太阳能调光器公开(公告)号：US20090002805A1
公开(公告)日：2009-01-01
申请号：US12210119
申请日：2008-09-12
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
CPC分类号： G02B26/0841
摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
摘要翻译： 显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。 显示系统还包括位于照明路径中的空间光调制器。 空间光调制器包括包括多个电极器件和耦合到半导体衬底的铰链结构的半导体衬底。 铰链结构包括硅材料。 空间光调制器还包括耦合到铰链结构并且延伸到半导体衬底预定距离的镜柱和耦合到镜柱并且覆盖多个电极器件的镜板。 显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。
-
公开(公告)号：US07522330B2
公开(公告)日：2009-04-21
申请号：US11448149
申请日：2006-06-05
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B26/008
摘要： An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device also includes a hinge device including a silicon material and coupled to the upper surface region. The optical deflection device further includes a spacing defined between the upper surface region and the hinge device and a mirror structure including a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion and overlying the hinge device.
摘要翻译： 一种用于显示器应用的光学偏转装置。 光偏转装置包括：半导体衬底，包括上表面区域和设置在上表面区域上的一个或多个电极器件。 光学偏转装置还包括铰链装置，其包括硅材料并且连接到上表面区域。 光学偏转装置还包括限定在上表面区域和铰链装置之间的间隔，以及反射镜结构，其包括联接到铰链装置的柱部分和耦合到柱部分并且覆盖铰链装置的镜板部分。
-
公开(公告)号：US08530258B2
公开(公告)日：2013-09-10
申请号：US13275617
申请日：2011-10-18
申请人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
发明人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
CPC分类号： H03H3/0072 , H03H3/0073 , H03H9/02244 , H03H9/2463 , H03H2009/02511 , H03H2009/02519
摘要： A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
摘要翻译： 谐振器包括具有第一电极和第二电极的CMOS衬底。 CMOS衬底被配置为向第一电极提供一个或多个控制信号。 谐振器还包括包括硅材料层的谐振器结构。 谐振器结构耦合到CMOS衬底并且被配置为响应于一个或多个控制信号而谐振。
-
公开(公告)号：US20110059565A1
公开(公告)日：2011-03-10
申请号：US12944982
申请日：2010-11-12
申请人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
发明人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
IPC分类号： H01L21/02
CPC分类号： H03H3/0072 , H03H3/0073 , H03H9/02244 , H03H9/2463 , H03H2009/02511 , H03H2009/02519
摘要： A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
摘要翻译： 谐振器包括具有第一电极和第二电极的CMOS衬底。 CMOS衬底被配置为向第一电极提供一个或多个控制信号。 谐振器还包括包括硅材料层的谐振器结构。 谐振器结构耦合到CMOS衬底并且被配置为响应于一个或多个控制信号而谐振。
-
公开(公告)号：US20080180516A1
公开(公告)日：2008-07-31
申请号：US12019822
申请日：2008-01-25
申请人： Xiao Yang , William Spencer Worley , Dongmin Chen , Ye Wang
发明人： Xiao Yang , William Spencer Worley , Dongmin Chen , Ye Wang
CPC分类号： G02B26/0841 , B41J2/471 , G02B26/105
摘要： A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
摘要翻译： 用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底，以及提供可移动到衬底和电极上的反射镜。 施加到电极的电压产生静电力，导致反射镜的一端被吸引到基板。 可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。
-
公开(公告)号：US20080150647A1
公开(公告)日：2008-06-26
申请号：US11950373
申请日：2007-12-04
申请人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
发明人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
CPC分类号： H03H3/0072 , H03H3/0073 , H03H9/02244 , H03H9/2463 , H03H2009/02511 , H03H2009/02519
摘要： A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
摘要翻译： 谐振器包括具有第一电极和第二电极的CMOS衬底。 CMOS衬底被配置为向第一电极提供一个或多个控制信号。 谐振器还包括包括硅材料层的谐振器结构。 谐振器结构耦合到CMOS衬底并且被配置为响应于一个或多个控制信号而谐振。
-
-
-
-
-
-
-
-
-
搜索结果
89 条记录 (耗时 0.025 秒)