发明申请
- 专利标题: Measuring Device with a Micro-Electromechanical Capacitive Sensor
- 专利标题(中): 具有微机电电容传感器的测量装置
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申请号: US13002926申请日: 2009-07-06
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公开(公告)号: US20110115501A1公开(公告)日: 2011-05-19
- 发明人: Lin He , Yiannos Manoli , Alexander Buhmann , Armin Taschwer , Thomas Northemann
- 申请人: Lin He , Yiannos Manoli , Alexander Buhmann , Armin Taschwer , Thomas Northemann
- 申请人地址: DE Freiburg
- 专利权人: ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG
- 当前专利权人: ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG
- 当前专利权人地址: DE Freiburg
- 优先权: DE102008031609.1 20080707
- 国际申请: PCT/EP2009/004868 WO 20090706
- 主分类号: G01R27/26
- IPC分类号: G01R27/26
摘要:
A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.
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