公开(公告)号：US20110115501A1

公开(公告)日：2011-05-19

申请号：US13002926

申请日：2009-07-06

申请人： Lin He ,  Yiannos Manoli ,  Alexander Buhmann ,  Armin Taschwer ,  Thomas Northemann

发明人： Lin He ,  Yiannos Manoli ,  Alexander Buhmann ,  Armin Taschwer ,  Thomas Northemann

IPC分类号： G01R27/26

CPC分类号： G01C19/5726

摘要： A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.

摘要翻译： 测量装置具有微电机电容传感器，其具有朝向和远离彼此移动的电极，用于测量测试质量块的机械偏转。 测量装置具有电荷积分器，其具有运算放大器，其具有至少一个放大器输入端连接到传感器，放大器输出通过积分电容反馈到放大器输入端。 放大器输入端通过高电阻电阻连接到端子，用于电气共模参考电位。 除放大器输入外，运算放大器还具有辅助输入。 放大器输出通过深通道连接到辅助输入。

公开(公告)号：US20140060185A1

公开(公告)日：2014-03-06

申请号：US13990583

申请日：2011-12-01

申请人： Stefan Rombach ,  Thomas Northemann ,  Michael Maurer ,  Mattias Dienger ,  Yiannos Manoli

发明人： Stefan Rombach ,  Thomas Northemann ,  Michael Maurer ,  Mattias Dienger ,  Yiannos Manoli

IPC分类号： G01C19/56

CPC分类号： G01C19/56 ,  G01C19/5776

摘要： A device for measuring yaw rate, having a mechanical yaw rate sensor, which has an inert mass that can be set into a primary vibration along a primary axis by means of an excitation device and can be deflected along a secondary axis extending transversely with respect to the primary axis so that when a yaw rate occurs about a sensitive axis extending transversely with respect to the primary and to the secondary axis, said device carries out a secondary vibration excited by the Coriolis force. A sensor element detects an amplitude-modulated signal for the secondary vibration. A sigma-delta modulator has a low pass filter connected to the sensor element, a quantizer and a secondary actuator disposed in a feedback path for applying a force which counteracts the Coriolis force.

摘要翻译： 一种用于测量横摆角速度的装置，具有机械摆动速度传感器，该传感器具有惰性质量，该惰性质量可以通过激励装置沿初级轴线被设定为初级振动，并且可以沿着相对于 主轴线使得当偏转速率围绕相对于主轴线和次轴线横向延伸的敏感轴线发生时，所述装置执行由科里奥利力激发的次级振动。 传感器元件检测二次振动的幅度调制信号。 Σ-Δ调制器具有连接到传感器元件的低通滤波器，设置在用于施加抵消科里奥利力的力的反馈路径中的量化器和次级致动器。

公开(公告)号：US08618816B2

公开(公告)日：2013-12-31

申请号：US13002926

申请日：2009-07-06

申请人： Lin He ,  Yiannos Manoli ,  Alexander Buhmann ,  Armin Taschwer ,  Thomas Northemann

发明人： Lin He ,  Yiannos Manoli ,  Alexander Buhmann ,  Armin Taschwer ,  Thomas Northemann

IPC分类号： G01R27/26

CPC分类号： G01C19/5726

摘要： A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.

摘要翻译： 测量装置具有微电机电容传感器，其具有朝向和远离彼此移动的电极，用于测量测试质量块的机械偏转。 测量装置具有电荷积分器，其具有运算放大器，其具有至少一个放大器输入端连接到传感器，放大器输出通过积分电容反馈到放大器输入端。 放大器输入端通过高电阻电阻连接到端子，用于电气共模参考电位。 除放大器输入外，运算放大器还具有辅助输入。 放大器输出通过深通道连接到辅助输入。

公开(公告)号：US20130197858A1

公开(公告)日：2013-08-01

申请号：US13634585

申请日：2011-03-17

申请人： Markus Egretzberger ,  Andreas Kugi ,  Florian Mair ,  Michael Maurer ,  Yiannos Manoli ,  Thomas Northemann

发明人： Markus Egretzberger ,  Andreas Kugi ,  Florian Mair ,  Michael Maurer ,  Yiannos Manoli ,  Thomas Northemann

IPC分类号： G01P3/14

CPC分类号： G01P3/14 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/5726

摘要： A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).

摘要翻译： 一种用于精确测量微机械旋转速率传感器的方法，所述微机械旋转速率传感器包括至少一个地震质量块，用于驱动主模式（q1）中的地震质量的至少一个驱动装置和共同地至少三个修整电极元件 与地震质量直接或间接相关。 在修整电极元件和地震块之间分别设置修整电压（u1，u2，u3，u4）。 根据谐振频率变量（uT，UT，0），正交变量（uc，UC，0）和恢复变量（uS）来调整每个修整电压（u1，u2，u3，u4）。

公开(公告)号：US09535084B2

公开(公告)日：2017-01-03

申请号：US13634585

申请日：2011-03-17

申请人： Markus Egretzberger ,  Andreas Kugi ,  Florian Mair ,  Michael Maurer ,  Yiannos Manoli ,  Thomas Northemann

发明人： Markus Egretzberger ,  Andreas Kugi ,  Florian Mair ,  Michael Maurer ,  Yiannos Manoli ,  Thomas Northemann

IPC分类号： G01P3/00 ,  G01P3/14 ,  G01C19/5712 ,  G01C19/5726 ,  G01C19/56

CPC分类号： G01P3/14 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/5726

摘要： A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).

摘要翻译： 一种用于精确测量微机械旋转速率传感器的方法，所述微机械旋转速率传感器包括至少一个地震质量块，用于驱动主模式（q1）中的地震质量的至少一个驱动装置和共同地至少三个修整电极元件 与地震质量直接或间接相关。 在修整电极元件和地震块之间分别设置修整电压（u1，u2，u3，u4）。 根据谐振频率变量（ũT，ŨT，0），正交变量（ũc，ŨC，0）和恢复变量（ũS），调整每个微调电压（u1，u2，u3，u4）。

公开(公告)号：US20140345378A1

公开(公告)日：2014-11-27

申请号：US14272716

申请日：2014-05-08

申请人： Thomas NORTHEMANN ,  Jens STROBEL

发明人： Thomas NORTHEMANN ,  Jens STROBEL

IPC分类号： G01C19/5762

CPC分类号： G01C19/5755

摘要： In a method for operating a rotation rate sensor including a substrate and a seismic mass, the seismic mass is driven in a drive direction in parallel to the main extension plane of the sensor to carry out a drive movement, and, during a rotation of the rotation rate sensor, the seismic mass is moved in a detection direction perpendicular to the drive direction and perpendicular to the rotation rate as a result of the action of force caused by the Coriolis force. The movement in the detection direction has a deflection amplitude, and the rotation rate sensor includes a deflection support element acting on the seismic mass in such a way that the deflection amplitude in the detection direction is increased.

摘要翻译： 在用于操作包括基板和地震块的旋转速率传感器的方法中，所述地震质量在与所述传感器的主延伸平面平行的驱动方向上被驱动以执行驱动运动，并且在旋转期间 旋转速率传感器，由于由科里奥利力引起的力的作用，地震质量在与驱动方向垂直的检测方向上并且垂直于旋转速度移动。 检测方向上的移动具有偏转振幅，旋转速率传感器包括作用在地震质量上的偏转支撑元件，使得检测方向上的偏转振幅增加。