Invention Application
- Patent Title: Electrostatic vibrator and electronic apparatus
- Patent Title (中): 静电振动器和电子设备
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Application No.: US12737170Application Date: 2009-06-23
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Publication No.: US20110127621A1Publication Date: 2011-06-02
- Inventor: Fumio Kimura , Ryohei Kamiya , Hiroshi Takahashi , Ryuta Mitsusue , Yoshifumi Yoshida
- Applicant: Fumio Kimura , Ryohei Kamiya , Hiroshi Takahashi , Ryuta Mitsusue , Yoshifumi Yoshida
- Priority: JP2008-166283 20080625; JP2009-133892 20090603
- International Application: PCT/JP2009/061424 WO 20090623
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
A silicon oxide film 113 is formed on the vibrating parts 102 and 103 of an MEMS-type electrostatically-actuated flexural vibrator. At least one structure where no oxide film is formed is provided near the vibrating parts 102 and 103. By employing a structure in which both ends of the structure and both ends of the vibrating parts 102 and 103 are integrally formed, a compressive stress is applied to the vibrating parts 102 and 103. As a result, the frequency temperature characteristics can be improved.
Public/Granted literature
- US08212325B2 Electrostatic vibrator and electronic apparatus Public/Granted day:2012-07-03
Information query
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