发明申请
- 专利标题： Flash Memory Having a Floating Gate in the Shape of a Curved Section
- 专利标题（中）： 闪存在曲面形状中具有浮动门
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申请号： US12629992申请日： 2009-12-03
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公开(公告)号： US20110133266A1公开(公告)日： 2011-06-09
- 发明人: Sanh Tang , Krishna K. Parat , Haitao Liu
- 申请人： Sanh Tang , Krishna K. Parat , Haitao Liu
- 主分类号： H01L29/788
- IPC分类号： H01L29/788 ; H01L21/28
摘要：
The floating gate of a flash memory may be formed with a flat lower surface facing a substrate and a curved upper surface facing the control gate. In some embodiments, such a device has improved capacitive coupling to the control gate and reduced capacitive coupling to its neighbors.
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