发明申请
- 专利标题: Liquid Precursor for Depositing Group 4 Metal Containing Films
- 专利标题(中): 用于沉积第4组含金属膜的液体前体
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申请号: US12950352申请日: 2010-11-19
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公开(公告)号: US20110135838A1公开(公告)日: 2011-06-09
- 发明人: Xinjian Lei , John Anthony Thomas Norman , Daniel P. Spence
- 申请人: Xinjian Lei , John Anthony Thomas Norman , Daniel P. Spence
- 申请人地址: US PA Allentown
- 专利权人: AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人: AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人地址: US PA Allentown
- 主分类号: C23C16/30
- IPC分类号: C23C16/30 ; C07F7/28 ; C23C16/44 ; C23C16/50 ; C23C16/48 ; C23C16/56
摘要:
The present invention is related to a family of liquid group 4 precursors represented by the formula: (pyr*)M(OR1)(OR2)(OR3) wherein pyr* is an alkyl substituted pyrrolyl, wherein M is group 4 metals include Ti, Zr, and Hf; wherein R1-3 can be same or different and selected from group consisting of linear or branched C1-6 alkyls; preferably C1-3 alkyls; R4 is selected from the group consisting of C1-6 alkyls, preferably branched C3-5 alkyls substituted at 2, 5 positions to prevent the pyrrolyl coordinated to the metal center in η1 fashion; n=2, 3, 4. Most preferably the invention is directed to (2,5-di-tert-butylpyrrolyl)(tris(ethoxy)titanium, (2,5-di-tert-amylpyrrolyl)(tris(ethoxy)titanium, and (2,5-di-tert-amylpyrrolyl)(tris(iso-propoxy)titanium. The invention is also directed to (cyclopentadienyl)(2,5-di-methylpyrrolyl)(bis(ethoxy))titanium. Deposition methods using these compounds are also contemplated.