发明申请
- 专利标题: METHOD FOR FABRICATING InGaAIN LIGHT-EMITTING DIODES WITH A METAL SUBSTRATE
- 专利标题(中): 用金属基材制造金属发光二极管的方法
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申请号: US13059140申请日: 2008-08-19
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公开(公告)号: US20110140080A1公开(公告)日: 2011-06-16
- 发明人: Chuanbing Xiong , Fengyi Jiang , Li Wang , Wenqing Fang , Guping Wang , Shaohua Zhang
- 申请人: Chuanbing Xiong , Fengyi Jiang , Li Wang , Wenqing Fang , Guping Wang , Shaohua Zhang
- 申请人地址: CN Nanchang, Jiangxi
- 专利权人: LATTICE POWER (JIANGXI) CORPORATION
- 当前专利权人: LATTICE POWER (JIANGXI) CORPORATION
- 当前专利权人地址: CN Nanchang, Jiangxi
- 优先权: CNPCT/CN2008/001493 20080819
- 国际申请: PCT/CN08/01493 WO 20080819
- 主分类号: H01L33/06
- IPC分类号: H01L33/06 ; H01L33/58 ; B82Y99/00 ; B82Y40/00
摘要:
One embodiment of the present invention provides a method for fabricating light-emitting diodes. The method includes etching grooves on a growth substrate, thereby creating mesas on the growth substrate. The method further includes fabricating on each of the mesas an indium gallium aluminum nitride (InGaAlN) multilayer structure which contains a p-type layer, a multi-quantum-well layer, and an n-type layer. In addition, the method includes depositing one or more metal substrate layers on top of the InGaAlN multilayer structure. Moreover, the method includes removing the growth substrate. Furthermore, the method includes creating electrodes on both sides of the InGaAlN multilayer structure, thereby resulting in a vertical-electrode configuration.
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