发明申请
- 专利标题: INTEGRATED TRIAXIAL MAGNETOMETER OF SEMICONDUCTOR MATERIAL MANUFACTURED IN MEMS TECHNOLOGY
- 专利标题(中): MEMS技术制造的半导体材料的集成三光子计
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申请号: US12965491申请日: 2010-12-10
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公开(公告)号: US20110140693A1公开(公告)日: 2011-06-16
- 发明人: Lorenzo Baldo , Francesco Procopio , Sarah Zerbini
- 申请人: Lorenzo Baldo , Francesco Procopio , Sarah Zerbini
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人地址: IT Agrate Brianza
- 优先权: ITTO2009A000973 20091210
- 主分类号: G01R33/02
- IPC分类号: G01R33/02
摘要:
Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.
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