公开(公告)号：US20110140693A1

公开(公告)日：2011-06-16

申请号：US12965491

申请日：2010-12-10

申请人： Lorenzo Baldo ,  Francesco Procopio ,  Sarah Zerbini

发明人： Lorenzo Baldo ,  Francesco Procopio ,  Sarah Zerbini

IPC分类号： G01R33/02

CPC分类号： G01R33/0286 ,  G01R33/0005 ,  G01R33/028 ,  G01R33/038

摘要： Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.

摘要翻译： 两个悬挂质量被配置为使得在相互横向上在磁力计平面中流动的相应电流流动，并且电容耦合到下电极。 移动感测电极由第一悬浮质量携带并且电容耦合到相应的固定感测电极。 第一悬挂质量被配置为在存在具有在第一水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的。 第二悬挂质量被配置为在存在具有在第二水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的，并且第一悬挂质量被配置为在平行于 并且在存在具有在垂直方向上的分量的磁场的情况下横向于在第一悬浮质量块中流动的电流。

公开(公告)号：US08471557B2

公开(公告)日：2013-06-25

申请号：US12965491

申请日：2010-12-10

申请人： Lorenzo Baldo ,  Francesco Procopio ,  Sarah Zerbini

发明人： Lorenzo Baldo ,  Francesco Procopio ,  Sarah Zerbini

IPC分类号： G01R33/02

CPC分类号： G01R33/0286 ,  G01R33/0005 ,  G01R33/028 ,  G01R33/038

摘要： Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.

摘要翻译： 两个悬挂质量被配置为使得在相互横向上在磁力计平面中流动的相应电流流动，并且电容耦合到下电极。 移动感测电极由第一悬浮质量携带并且电容耦合到相应的固定感测电极。 第一悬挂质量被配置为在存在具有在第一水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的。 第二悬挂质量被配置为在存在具有在第二水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的，并且第一悬挂质量被配置为在平行于 并且在存在具有在垂直方向上的分量的磁场的情况下横向于在第一悬浮质量块中流动的电流。

公开(公告)号：US06924958B2

公开(公告)日：2005-08-02

申请号：US10001922

申请日：2001-11-13

申请人： Benedetto Vigna ,  Simone Sassolini ,  Sarah Zerbini ,  Lorenzo Baldo

发明人： Benedetto Vigna ,  Simone Sassolini ,  Sarah Zerbini ,  Lorenzo Baldo

IPC分类号： G11B5/596

CPC分类号： G01R33/0286 ,  G11B5/59677

摘要： Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.

摘要翻译： 这里描述了一种用于具有双驱动级的硬盘驱动器的读/写换能器，包括至少一个硬盘和至少一个承载读/写换能器的悬架。 读/写换能器包括具有基本上平行六面体形状的支撑体，布置在支撑体的前表面上的读/写头和在制造过程中在支撑体的一个侧面上限定的光栅 读/写传感器。 该光栅能够使用激光发射器以光学方式测量读/写换能器相对于相应悬架的位置，该激光发射器向激光束发射和指向光栅;以及激光接收器，被布置成拦截由 光栅并输出位置信号，基于此可以以简单的方式计算读/写换能器相对于相应悬架的位置。

公开(公告)号：US08413506B2

公开(公告)日：2013-04-09

申请号：US12626433

申请日：2009-11-25

申请人： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

发明人： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC分类号： G01C19/56

CPC分类号： G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

摘要： An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

摘要翻译： 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。

公开(公告)号：US20120161756A1

公开(公告)日：2012-06-28

申请号：US13333848

申请日：2011-12-21

申请人： Dario Paci ,  Sarah Zerbini

发明人： Dario Paci ,  Sarah Zerbini

IPC分类号： G01R33/12

CPC分类号： G01R33/093 ,  B82Y25/00 ,  G01R33/0011

摘要： An integrated magnetic-field sensor designed to detect an external magnetic field, comprising a first magnetoresistive structure for detecting the external magnetic field, the first magnetoresistive structure including first magnetoresistive means having a main axis of magnetization and a secondary axis of magnetization set orthogonal to one another. The magnetic-field sensor further comprises a magnetic-field generator, including a first portion configured for generating a first magnetic field having field lines in a first field direction, and a second portion, which is coplanar and is connected to the first portion, configured for generating a second magnetic field having field lines in a second field direction, the first magnetoresistive means being configured so that the main axis of magnetization extends parallel to the first field direction, and the secondary axis of magnetization extends parallel to the second field direction.

摘要翻译： 设计成检测外部磁场的集成磁场传感器，包括用于检测外部磁场的第一磁阻结构，所述第一磁阻结构包括具有主轴的磁化的第一磁阻装置和与其正交的磁化的次级轴 另一个。 磁场传感器还包括磁场发生器，包括被配置为产生具有第一场方向上的场线的第一磁场的第一部分和共面并连接到第一部分的第二部分，配置 为了产生具有第二场方向上的场线的第二磁场，第一磁阻装置构造成使得主磁化轴平行于第一场方向延伸，并且磁化的次级轴平行于第二场方向延伸。

公开(公告)号：US07886601B2

公开(公告)日：2011-02-15

申请号：US11978056

申请日：2007-10-26

申请人： Angelo Merassi ,  Sarah Zerbini ,  Hubert Geitner ,  Marco Del Sarto

发明人： Angelo Merassi ,  Sarah Zerbini ,  Hubert Geitner ,  Marco Del Sarto

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P1/023 ,  G01P15/0891 ,  G01P2015/0814 ,  G01P2015/082 ,  G01P2015/0831

摘要： A microelectromechanical sensing structure is provided with a mobile element adapted to be displaced as a function of a quantity to be detected, and first fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element first detection conditions. The sensing structure is further provided with second fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element second detection conditions, which are different from the first detection conditions. In particular, the first and second detection conditions differ with respect to a full-scale or a sensitivity value in the detection of the aforesaid quantity.

摘要翻译： 微机电感测结构设置有适于根据要检测的量移位的移动元件以及电容耦合到移动元件并被配置为利用移动元件实现第一检测条件的第一固定元件。 感测结构还设置有电容耦合到移动元件的第二固定元件，并被配置为与第一检测条件不同的移动元件第二检测条件实现。 特别地，第一和第二检测条件相对于检测上述量的满量程或灵敏度值而不同。

公开(公告)号：US20090100930A1

公开(公告)日：2009-04-23

申请号：US12208977

申请日：2008-09-11

申请人： Luca Coronato ,  Alessandro Balzelli Ludovico ,  Sarah Zerbini

发明人： Luca Coronato ,  Alessandro Balzelli Ludovico ,  Sarah Zerbini

IPC分类号： G01C19/56

CPC分类号： G01C19/5712 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0828

摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the detection movement. The detection movement is a rotation about an axis lying in a plane. The sensing mass has, in plan view, a non-rectangular shape; in particular, the sensing mass has a radial geometry and, in plan view, the overall shape of a radial annulus sector.

摘要翻译： 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块通过弹性锚固元件锚固到沿旋转轴线布置的锚固件。 在驱动质量块内提供一个开口，并且传感块布置在开口内。 弹性支撑和锚固元件使得感测质量在旋转运动中固定到驱动质量块，并且在检测运动中基本上与驱动质量分离。 检测运动是围绕位于平面中的轴的旋转。 在平面图中，感测质量具有非矩形形状; 特别地，感测质量具有径向几何形状，并且在平面图中是径向环形扇区的整体形状。

公开(公告)号：US07322242B2

公开(公告)日：2008-01-29

申请号：US11201268

申请日：2005-08-10

申请人： Angelo Merassi ,  Bruno Murari ,  Sarah Zerbini

发明人： Angelo Merassi ,  Bruno Murari ,  Sarah Zerbini

IPC分类号： G01P15/00

CPC分类号： G01P15/125 ,  B81B7/0048 ,  B81B2201/0235 ,  G01P1/006 ,  G01P2015/082

摘要： In a micro-electromechanical structure, a rotor has a centroidal axis and includes a suspended structure which carries mobile electrodes. A stator carries fixed electrodes facing the mobile electrodes. The suspended structure is connected to a rotor-anchoring region via elastic elements. The stator includes at least one stator element, which carries a plurality of fixed electrodes and is fixed to a stator-anchoring region. One of the rotor-anchoring regions and stator-anchoring regions extends along the centroidal axis and at least another of the rotor-anchoring regions and stator-anchoring regions extends in the proximity of the centroidal axis.

摘要翻译： 在微机电结构中，转子具有重心轴线，并且包括携带移动电极的悬挂结构。 定子承载面向移动电极的固定电极。 悬挂结构通过弹性元件连接到转子 - 锚定区域。 定子包括至少一个定子元件，该定子元件承载多个固定电极并固定到定子 - 锚定区域。 转子锚定区域和定子 - 锚定区域之一沿着重心轴线延伸，并且至少另一个转子 - 锚定区域和定子 - 锚定区域在重心轴线附近延伸。

公开(公告)号：US20080011080A1

公开(公告)日：2008-01-17

申请号：US11777702

申请日：2007-07-13

申请人： Angelo Merassi ,  Sarah Zerbini ,  Ernesto Lasalandra ,  Benedetto Vigna

发明人： Angelo Merassi ,  Sarah Zerbini ,  Ernesto Lasalandra ,  Benedetto Vigna

IPC分类号： G01P15/18 ,  G01P15/125

CPC分类号： G11B19/04 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

摘要： An inertial sensor provided with a detection structure sensitive to a first, a second and a third component of acceleration along respective directions of detection, and generating respective electrical quantities as a function of said components of acceleration. The detection structure supplies at output a resultant electrical quantity obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration acting on the inertial sensor, given by a vector sum of the components of acceleration. In particular, the detection structure is of a microelectromechanical type, and comprises a mobile portion made of semiconductor material forming with a fixed portion a first, a second and a third detection capacitor, and an electrical-interconnection portion, connecting the detection capacitors in parallel; the resultant electrical quantity being the capacitance obtained from said connection in parallel.

摘要翻译： 一种惯性传感器，其具有对沿着检测方向的加速度的第一，第二和第三分量敏感的检测结构，并且产生作为所述加速度分量的函数的相应的电量。 检测结构在输出时提供作为所述电量的组合获得的合成电量，并且与由加速度分量的矢量和给出的作用在惯性传感器上的合成加速度的值相关联。 特别地，检测结构是微机电型的，并且包括由半导体材料制成的可移动部分，该半导体材料形成有固定部分，第一，第二和第三检测电容器以及并联连接检测电容器的电互连部分 ; 所得到的电量是从所述连接并联获得的电容。

公开(公告)号：US20050274184A1

公开(公告)日：2005-12-15

申请号：US10948095

申请日：2004-09-23

申请人： Sarah Zerbini ,  Angelo Merassi ,  Ernesto Lasalandra ,  Benedetto Vigna

发明人： Sarah Zerbini ,  Angelo Merassi ,  Ernesto Lasalandra ,  Benedetto Vigna

IPC分类号： G01P15/08 ,  G01P15/125 ,  G01P15/00

CPC分类号： G01P15/0891 ,  G01P15/125 ,  G01P2015/0857 ,  H04M2250/12

摘要： A planar inertial sensor includes a first region and a second region of semiconductor material. The second region is capacitively coupled, and mobile with respect to the first region. The second region extends in a plane and has second portions, which face respective first portions of the first region. Movement of the second region, relative to the first region, in any direction belonging to the plane modifies the distance between the second portions and the first portions, which in turn modifies a value of the capacitive coupling.

摘要翻译： 平面惯性传感器包括第一区域和第二半导体材料区域。 第二区域电容耦合，并相对于第一区域移动。 第二区域在平面中延伸并且具有面对第一区域的相应第一部分的第二部分。 第二区域相对于第一区域在属于该平面的任何方向上的运动修改了第二部分和第一部分之间的距离，从而改变了电容耦合的值。