发明申请
- 专利标题： TIME-OF-FLIGHT SPECTROMETRY AND SPECTROSCOPY OF SURFACES
- 专利标题（中）： 飞行时间光谱和表面光谱
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申请号： US12956665申请日： 2010-11-30
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公开(公告)号： US20110147578A1公开(公告)日： 2011-06-23
- 发明人: J. Albert Schultz , Thomas F. Egan , Steven Ulrich , Kelley L. Waters
- 申请人： J. Albert Schultz , Thomas F. Egan , Steven Ulrich , Kelley L. Waters
- 申请人地址： US TX Houston
- 专利权人： IONWERKS, INC.
- 当前专利权人： IONWERKS, INC.
- 当前专利权人地址： US TX Houston
- 主分类号： H01J49/40
- IPC分类号： H01J49/40 ; H01J49/14
摘要：
Described is an analytical method and apparatus for counting and measuring the flight time of secondary electrons, secondary ions and neutrals, scattered ions and/or neutrals and for correlating coincidences between these while maintaining a continuous un-pulsed, micro-focused, primary particle beam for impinging a surface for purposes of microprobe imaging and microanalysis.
公开/授权文献
- US08829428B2 Time-of-flight spectrometry and spectroscopy of surfaces 公开/授权日：2014-09-09
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