TIME-OF-FLIGHT MASS SPECTROMETRY OF SURFACE
    3.
    发明申请
    TIME-OF-FLIGHT MASS SPECTROMETRY OF SURFACE 有权
    表面飞行时间质谱

    公开(公告)号:US20120085898A1

    公开(公告)日:2012-04-12

    申请号:US13328091

    申请日:2011-12-16

    摘要: The present invent provides a particle detector for counting and measuring the flight time of secondary electrons and scattered ions and neutrals and to correlate coincidences between these and backscattered ions/and neutrals while maintaining a continuous unpulsed microfocused primary ion beam for impinging a surface. Intensities of the primary particle scattering and secondary particle emissions are correlated with the position of impact of the focused beam onto a materials surface so that a spatially resolved surface elemental and electronic structural mapping is obtained by scanning the focused beam across the surface.

    摘要翻译: 本发明提供了一种用于计数和测量二次电子和散射离子和中性粒子的飞行时间的粒子检测器,并且使这些和背散射离子和中性粒子之间的一致性相关联,同时保持用于冲击表面的连续的未脉冲的聚焦的初始离子束。 初级粒子散射和二次粒子发射的强度与聚焦光束在材料表面上的冲击位置相关,从而通过扫描聚焦束穿过表面获得空间分辨的表面元素和电子结构映射。

    Multi-anode detector with increased dynamic range for time-of-flight mass spectrometers with counting data acquisition
    7.
    发明授权
    Multi-anode detector with increased dynamic range for time-of-flight mass spectrometers with counting data acquisition 失效
    多阳极检测器具有增加的飞行时间质谱仪的动态范围,具有计数数据采集功能

    公开(公告)号:US07060973B2

    公开(公告)日:2006-06-13

    申请号:US10957897

    申请日:2004-10-04

    申请人: Marc Gonin

    发明人: Marc Gonin

    IPC分类号: H01J49/00

    CPC分类号: H01J49/025 H01J49/40

    摘要: A new detection scheme for time-of-flight mass spectrometers is disclosed. This detection scheme allows extending the dynamic range of spectrometers operating with a counting technique (TDC). The extended dynamic range is achieved by constructing a multiple anode detector wherein the individual anodes detect different fractions of the incoming particles. Different anode fractions are achieved by varying the size, physical location, and electrical/magnetic fields of the various anodes. An anode with a small anode fraction avoids saturation and allows an ion detector to render an accurate count of ions even for abundant species.

    摘要翻译: 公开了一种新的飞行时间质谱仪检测方案。 该检测方案允许通过计数技术(TDC)扩展光谱仪的动态范围。 通过构建多阳极检测器来实现扩展的动态范围,其中各个阳极检测进入的颗粒的不同部分。 通过改变各种阳极的尺寸,物理位置和电/磁场来实现不同的阳极分数。 具有小阳极部分的阳极避免饱和,并且允许离子检测器即使对于丰富的物质也能提供精确的离子计数。

    Time-of-flight mass spectrometry of surfaces
    9.
    发明授权
    Time-of-flight mass spectrometry of surfaces 有权
    飞行时间质谱的表面

    公开(公告)号:US08519329B2

    公开(公告)日:2013-08-27

    申请号:US13328091

    申请日:2011-12-16

    IPC分类号: H01J49/40

    摘要: The present invent provides a particle detector for counting and measuring the flight time of secondary electrons and scattered ions and neutrals and to correlate coincidences between these and backscattered ions/and neutrals while maintaining a continuous unpulsed microfocused primary ion beam for impinging a surface. Intensities of the primary particle scattering and secondary particle emissions are correlated with the position of impact of the focused beam onto a materials surface so that a spatially resolved surface elemental and electronic structural mapping is obtained by scanning the focused beam across the surface.

    摘要翻译: 本发明提供了一种用于计数和测量二次电子和散射离子和中性粒子的飞行时间的粒子检测器,并且使这些和背散射离子和中性粒子之间的一致性相关联,同时保持用于冲击表面的连续的未脉冲的聚焦的初始离子束。 初级粒子散射和二次粒子发射的强度与聚焦光束在材料表面上的冲击位置相关,从而通过扫描聚焦束穿过表面获得空间分辨的表面元素和电子结构映射。