发明申请
- 专利标题: DISPLAY DEVICE, COPPER ALLOY FILM FOR USE THEREIN, AND COPPER ALLOY SPUTTERING TARGET
- 专利标题(中): 显示器件,铜合金膜及铜合金溅射靶
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申请号: US13056444申请日: 2009-08-14
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公开(公告)号: US20110147753A1公开(公告)日: 2011-06-23
- 发明人: Takashi Onishi , Aya Miki , Hiroshi Goto , Masao Mizuno , Hirotaka Ito , Katsufumi Tomihisa
- 申请人: Takashi Onishi , Aya Miki , Hiroshi Goto , Masao Mizuno , Hirotaka Ito , Katsufumi Tomihisa
- 申请人地址: JP Kobe-Shi
- 专利权人: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- 当前专利权人: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- 当前专利权人地址: JP Kobe-Shi
- 优先权: JP2008-208960 20080814
- 国际申请: PCT/JP09/64338 WO 20090814
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; B32B17/06
摘要:
Disclosed is a Cu alloy film for a display device that has high adhesion to a glass substrate while maintaining a low electric resistance characteristic of Cu-based materials. The Cu alloy film is wiring in direct contact with a glass substrate on a board and contains 0.1 to 10.0 atomic % in total of one or more elements selected from the group consisting of Ti, Al, and Mg. Also disclosed is a display device comprising a thin-film transistor that comprises the Cu alloy film. In a preferred embodiment of the display device, the thin-film transistor has a bottom gate-type structure, and a gate electrode and scanning lines in the thin-film transistor comprise the Cu alloy film and are in direct contact with the glass substrate.
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