发明申请
- 专利标题： THIN FILM TUNING-FORK TYPE INFLECTION RESONATOR AND ELECTRIC SIGNAL PROCESSING ELEMENT
- 专利标题（中）： 薄膜调谐型输入谐振器和电信号处理元件
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申请号： US13036318申请日： 2011-02-28
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公开(公告)号： US20110148257A1公开(公告)日： 2011-06-23
- 发明人: Atsushi Isobe , Nobuhiko Shibagaki , Kengo Asai , Hisanori Matsumoto
- 申请人： Atsushi Isobe , Nobuhiko Shibagaki , Kengo Asai , Hisanori Matsumoto
- 优先权： JP2006-028230 20060206
- 主分类号： H01L41/047
- IPC分类号： H01L41/047 ; H01L41/04
摘要：
A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.
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