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1.发明授权Thin film tuning-fork type inflection resonator and electric signal processing element 失效薄膜音叉型变形谐振器和电信号处理元件公开(公告)号：US08102102B2
公开(公告)日：2012-01-24
申请号：US13036318
申请日：2011-02-28
IPC分类号： H03H9/19
CPC分类号： H03H9/21 , H03H2003/026
摘要： A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.
摘要翻译： 紧凑型谐振器具有宽带宽和特定振动频率的小变化。 谐振器是薄膜音叉式拐点共振器，其中在其上形成有下电极的基板上形成由压电材料制成的薄膜，并且在压电薄膜上形成上电极。
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2.发明授权Thin film tuning-fork type inflection resonator and electric signal processing element 失效薄膜音叉型变形谐振器和电信号处理元件公开(公告)号：US07915793B2
公开(公告)日：2011-03-29
申请号：US11670081
申请日：2007-02-01
CPC分类号： H03H9/21 , H03H2003/026
摘要： A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.
摘要翻译： 紧凑型谐振器具有宽带宽和特定振动频率的小变化。 谐振器是薄膜音叉式拐点共振器，其中在其上形成有下电极的基板上形成由压电材料制成的薄膜，并且在压电薄膜上形成上电极。
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3.发明授权Bulk acoustic wave resonator, bulk acoustic wave filter, RF module including bulk acoustic wave resonator and/or filter, and bulk acoustic wave oscillator 失效体声波谐振器，体声波滤波器，包括体声波谐振器和/或滤波器的RF模块以及体声波振荡器公开(公告)号：US07586390B2
公开(公告)日：2009-09-08
申请号：US11345538
申请日：2006-02-02
CPC分类号： H03H9/02086 , H03H9/174 , H03H9/175
摘要： A bulk acoustic wave resonator which has excellent elasticity and high electromechanical energy conversion efficiency. A bulk acoustic wave resonator comprises a substrate, a lower electrode formed on the substrate, an interlayer formed on the lower electrode layer, a piezoelectric layer formed on the interlayer, and an upper electrode layer formed on the piezoelectric layer. Moreover, both the first lattice mismatch, which is determined between a short edge of the lattice constituting a closest packed plane of a material consisting of an interlayer and a short edge of the lattice constituting a closest packed plane of a material consisting of a piezoelectric layer, and the second lattice mismatch, which is determined between a long edge of the lattice constituting a closest packed plane of a material consisting of an interlayer and a long edge of the lattice constituting a closest packed plane of a material consisting of the piezoelectric layer, are 7% or less, and a lower electrode layer is a material in which the value of the elastic stiffness C33 is 300 GN/m2 or more.
摘要翻译： 具有优异弹性和高机电能量转换效率的体声波谐振器。 体声波谐振器包括基板，形成在基板上的下电极，形成在下电极层上的中间层，形成在中间层上的压电层，以及形成在压电层上的上电极层。 此外，在构成由中间层构成的材料的最接近的填充平面的晶格的短边缘和构成由压电层构成的材料的最接近的填充平面的晶格的短边缘之间确定的第一晶格失配 以及在构成由中间层构成的材料的最接近的填充平面的格子的长边和构成由压电体构成的材料的最接近的填充面的格子的长边缘之间确定的第二晶格失配， 为7％以下，下部电极层为弹性刚度C33的值为300Ng / m 2以上的材料。
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4.发明申请THIN FILM PIEZOELECTRIC BULK ACOUSTIC WAVE RESONATOR AND RADIO FREQUENCY FILTER USING THE SAME 失效薄膜压电体积波形谐振器和无线电频率滤波器公开(公告)号：US20080024042A1
公开(公告)日：2008-01-31
申请号：US11627858
申请日：2007-01-26
IPC分类号： H01L41/047
CPC分类号： H03H9/02228 , H03H3/04 , H03H9/173 , H03H9/175 , H03H9/564 , H03H9/568 , H03H9/605 , H03H2003/0428 , H03H2003/0457 , H03H2003/0471
摘要： An object of the present invention is to provide an inexpensive thin film piezoelectric bulk acoustic wave resonator that allows fine-tuning of a resonant frequency. Another object is to provide an inexpensive filter with dramatically improved frequency characteristics, using thin film piezoelectric bulk acoustic wave resonators that can be formed on one substrate. A thin film piezoelectric bulk acoustic wave resonator of the present invention has a laminated structure including a piezoelectric thin film, and a first metal electrode film and a second metal electrode film between which part of the piezoelectric thin film is sandwiched; the first metal electrode film has a plurality of holes formed on an electrode plane opposite to the second metal electrode film and having a depth equivalent to at least the thickness of the first metal electrode film; and if a combined thickness of top and bottom electrode layers and the piezoelectric thin film is ht, the covering ratio σ of the electrode plane of the first metal electrode film satisfies a condition 0
摘要翻译： 本发明的目的是提供一种廉价的薄膜压电体声波谐振器，其允许谐振频率的微调。 另一个目的是提供一种具有显着改善的频率特性的便宜的滤波器，使用可以在一个基板上形成的薄膜压电体声波谐振器。 本发明的薄膜压电体声波谐振器具有包括压电薄膜和第一金属电极薄膜和第二金属电极薄膜的叠层结构，压电薄膜的一部分夹在其间; 所述第一金属电极膜具有形成在与所述第二金属电极膜相反的电极面上并且具有至少等于所述第一金属电极膜的厚度的深度的多个孔; 并且如果顶部和底部电极层和压电薄膜的组合厚度为ht，则对于每1.28ht间距，第一金属电极膜的电极平面的覆盖比sigma满足条件0 <σ<1。
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公开(公告)号：US20060158283A1
公开(公告)日：2006-07-20
申请号：US11333282
申请日：2006-01-18
IPC分类号： H03H9/54
CPC分类号： H03H9/174 , H03H9/02102 , H03H9/173 , H03H9/178
摘要： A piezoelectric thin film resonator is formed on a base substrate such as made of Si in which the resonance frequency is substantially determined by the lateral size not by the thickness of the resonator, whereby a resonator for use in TCXO, etc. is provided by the thin film technique, which enables to reduce the thickness of the film and the size of the resonator and integration with Si-based IC incorporating the resonator in one identical substrate.
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6.发明授权Antenna beam scan unit and wireless communication system using antenna beam scan unit 有权天线波束扫描单元和使用天线波束扫描单元的无线通信系统公开(公告)号：US08644367B2
公开(公告)日：2014-02-04
申请号：US13438957
申请日：2012-04-04
IPC分类号： H04B1/38
CPC分类号： H01Q3/2682
摘要： An antenna beam scan unit includes: a Rotman lens that performs power division and synthesis between plural antenna ports and three or more beam ports; plural antenna elements which are connected to the respective antenna ports and to or from which radio waves are inputted or outputted; plural amplifiers that are connected to the respective beam ports of the Rotman lens and perform amplitude modulation on a signal; input paths for a transmission signal disposed in association with the amplifiers; switches for switching the input paths; and a beam control unit. The input paths include first paths and second paths on which a signal that is out of phase with a signal on the first paths is produced. The beam control unit selects two adjoining beam ports, and can switch the first paths and second paths as the input paths for the two beam ports.
摘要翻译： 天线波束扫描单元包括：Rotman透镜，其在多个天线端口和三个或更多波束端口之间执行功率分配和合成; 多个天线元件，其连接到各个天线端口，并且输入或输出无线电波; 多个放大器，连接到Rotman透镜的各个光束端口并对信号进行幅度调制; 用于与放大器相关联地布置的传输信号的输入路径; 用于切换输入路径的开关; 和光束控制单元。 输入路径包括第一路径和第二路径，其上产生与第一路径上的信号异相的信号。 光束控制单元选择两个邻接的波束端口，并且可以将第一路径和第二路径切换为两个波束端口的输入路径。
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7.发明申请ANTENNA BEAM SCAN UNIT AND WIRELESS COMMUNICATION SYSTEM USING ANTENNA BEAM SCAN UNIT 有权天线光束扫描单元和使用天线光束扫描单元的无线通信系统公开(公告)号：US20120257653A1
公开(公告)日：2012-10-11
申请号：US13438957
申请日：2012-04-04
CPC分类号： H01Q3/2682
摘要： An antenna beam scan unit includes: a Rotman lens that performs power division and synthesis between plural antenna ports and three or more beam ports; plural antenna elements which are connected to the respective antenna ports and to or from which radio waves are inputted or outputted; plural amplifiers that are connected to the respective beam ports of the Rotman lens and perform amplitude modulation on a signal; input paths for a transmission signal disposed in association with the amplifiers; switches for switching the input paths; and a beam control unit. The input paths include first paths and second paths on which a signal that is out of phase with a signal on the first paths is produced. The beam control unit selects two adjoining beam ports, and can switch the first paths and second paths as the input paths for the two beam ports.
摘要翻译： 天线波束扫描单元包括：Rotman透镜，其在多个天线端口和三个或更多波束端口之间执行功率分配和合成; 多个天线元件，其连接到各个天线端口，并且输入或输出无线电波; 多个放大器，连接到Rotman透镜的各个光束端口并对信号进行幅度调制; 用于与放大器相关联地布置的传输信号的输入路径; 用于切换输入路径的开关; 和光束控制单元。 输入路径包括第一路径和第二路径，其上产生与第一路径上的信号异相的信号。 光束控制单元选择两个邻接的波束端口，并且可以将第一路径和第二路径切换为两个波束端口的输入路径。
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8.发明申请THIN FILM TUNING-FORK TYPE INFLECTION RESONATOR AND ELECTRIC SIGNAL PROCESSING ELEMENT 失效薄膜调谐型输入谐振器和电信号处理元件公开(公告)号：US20110148257A1
公开(公告)日：2011-06-23
申请号：US13036318
申请日：2011-02-28
IPC分类号： H01L41/047 , H01L41/04
CPC分类号： H03H9/21 , H03H2003/026
摘要： A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.
摘要翻译： 紧凑型谐振器具有宽带宽和特定振动频率的小变化。 谐振器是薄膜音叉式拐点共振器，其中在其上形成有下电极的基板上形成由压电材料制成的薄膜，并且在压电薄膜上形成上电极。
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公开(公告)号：US07385464B2
公开(公告)日：2008-06-10
申请号：US11312414
申请日：2005-12-21
CPC分类号： H03H9/605 , H03H9/6483
摘要： A resonator is connected in parallel to at least one serial-arm-connected resonator in a resonator type filter having a serial arm and a parallel arm. At this time, the resonance frequency of the resonator connected in parallel is set to be substantially the same as the resonance frequency of the parallel-arm-connected resonator.This makes it possible to prevent the deterioration of attenuation levels at the lower-frequency side of the filter, caused by an increase in the resistance of a connection element due to an increase in packaging density.
摘要翻译： 谐振器与具有串联臂和并联臂的谐振器型滤波器中的至少一个串联臂连接的谐振器并联连接。 此时，并联连接的谐振器的谐振频率被设定为与并联臂连接的谐振器的谐振频率基本相同。 这使得可以防止由于封装密度的增加导致的连接元件的电阻的增加而导致的滤波器的低频侧的衰减电平的劣化。
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公开(公告)号：US20060141944A1
公开(公告)日：2006-06-29
申请号：US11303924
申请日：2005-12-19
IPC分类号： H04B1/44
摘要： A compact, inexpensive antenna sharing device meeting requirements in terms of transmitter distortion characteristic and ESD characteristic is provided which separates and combines signals transmitted and received in first to third signal bands and which thereby enables an antenna terminal to be shared as a common terminal. It includes a diplexer realizing an attenuation characteristic for protection against ESD, a compound semiconductor switch with an IIP3 of 66 dBm or more, and an inexpensive PIN diode switch.
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