发明申请
- 专利标题: Controlling the Temperature Profile in a Sheet Wafer
- 专利标题(中): 控制片晶片中的温度曲线
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申请号: US13015258申请日: 2011-01-27
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公开(公告)号: US20110155045A1公开(公告)日: 2011-06-30
- 发明人: Kaitlin Olsen , Weidong Huang , Christine Richardson
- 申请人: Kaitlin Olsen , Weidong Huang , Christine Richardson
- 申请人地址: US MA Marlborough
- 专利权人: EVERGREEN SOLAR, INC.
- 当前专利权人: EVERGREEN SOLAR, INC.
- 当前专利权人地址: US MA Marlborough
- 主分类号: C30B15/20
- IPC分类号: C30B15/20 ; C30B15/10
摘要:
A sheet wafer growth system includes a crucible for containing molten material and an afterheater positioned above the crucible. The afterheater has an inner surface disposed toward the crucible. The system further includes one or more shields adjacent to the inner surface of the afterheater. The afterheater and the shield(s) are configured to allow a sheet wafer to pass adjacent to the shield(s). Each shield has two or more substantially different thermally conductive regions such that the two or more regions are configured to control the temperature profile of the growing sheet wafer.
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