发明申请
- 专利标题： DUAL RESISTANCE HEATER FOR PHASE CHANGE DEVICES AND MANUFACTURING METHOD THEREOF
- 专利标题（中）： 用于相变装置的双电阻加热器及其制造方法
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申请号： US12980141申请日： 2010-12-28
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公开(公告)号： US20110155986A1公开(公告)日： 2011-06-30
- 发明人: Yudong Kim , Ilya V. Karpov , Charles C. Kuo , Greg Atwood , Maria Santina Marangon , Tyler Lowrey
- 申请人： Yudong Kim , Ilya V. Karpov , Charles C. Kuo , Greg Atwood , Maria Santina Marangon , Tyler Lowrey
- 优先权： EPEP04107070.7 20041230
- 主分类号： H01L45/00
- IPC分类号： H01L45/00 ; H01L21/02
摘要：
A dual resistance heater for a phase change material region is formed by depositing a resistive material. The heater material is then exposed to an implantation or plasma which increases the resistance of the surface of the heater material relative to the remainder of the heater material. As a result, the portion of the heater material approximate to the phase change material region is a highly effective heater because of its high resistance, but the bulk of the heater material is not as resistive and, thus, does not increase the voltage drop and the current usage of the device.