发明申请
- 专利标题： WAFER TEST CASSETTE SYSTEM
- 专利标题（中）： WAFER测试CASSETTE系统
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申请号： US12979200申请日： 2010-12-27
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公开(公告)号： US20110156735A1公开(公告)日： 2011-06-30
- 发明人: Keith J. Breinlinger , Eric D. Hobbs
- 申请人： Keith J. Breinlinger , Eric D. Hobbs
- 专利权人： FORMFACTOR, INC.
- 当前专利权人： FORMFACTOR, INC.
- 主分类号： G01R31/00
- IPC分类号： G01R31/00
摘要：
Wafer cassette systems and methods of using wafer cassette systems. A wafer cassette system can include a base and a probe card assembly. The base and the probe card assembly can each include complementary interlocking alignment elements. The alignment elements can constrain relative movement of the base and probe card assembly in directions parallel to a wafer receiving surface of the base, while permitting relative movement in a direction perpendicular to the receiving surface.
公开/授权文献
- US08872532B2 Wafer test cassette system 公开/授权日：2014-10-28
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