发明申请
US20110158886A1 POLYSILANE PRODUCTION PROCESS 审中-公开
多晶生产工艺

POLYSILANE PRODUCTION PROCESS
摘要:
A polysilane production process comprising reacting a specific silane compound typified by a cyclic silane compound represented by the following formula (2) in the presence of a binuclear metal complex represented by the following formula (4). SijH2j  (2) (in the formula (2), j is an integer of 3 to 10.) [CpM(μ-CH2)]2  (4) (in the formula (4), Cp is a cyclopentadienyl-based ligand, M is a metal atom selected from Rh and Ir, and the bond between M's is a double bond.)
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