发明申请
- 专利标题: Microsprings Having Nanowire Tip Structures
- 专利标题(中): 具有纳米线尖端结构的微管
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申请号: US13045042申请日: 2011-03-10
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公开(公告)号: US20110167526A1公开(公告)日: 2011-07-07
- 发明人: Eugene Chow , Pengfei Qi
- 申请人: Eugene Chow , Pengfei Qi
- 申请人地址: US CA Palo Alto
- 专利权人: PALO ALTO RESEARCH CENTER INCORPORATED
- 当前专利权人: PALO ALTO RESEARCH CENTER INCORPORATED
- 当前专利权人地址: US CA Palo Alto
- 主分类号: G01Q70/08
- IPC分类号: G01Q70/08 ; B82Y30/00
摘要:
A stress-engineered microspring is formed generally in the plane of a substrate. A nanowire (or equivalently, a nanotube) is formed at the tip thereof, also in the plane of the substrate. Once formed, the length of the nanowire may be defined, for example photolithographically. A sacrificial layer underlying the microspring may then be removed, allowing the engineered stresses in the microspring to cause the structure to bend out of plane, elevating the nanowire off the substrate and out of plane. Use of the nanowire as a contact is thereby provided. The nanowire may be clamped at the tip of the microspring for added robustness. The nanowire may be coated during the formation process to provide additional functionality of the final device.