发明申请
US20110175238A1 Method for Producing Semiconductor Chips and Corresponding Semiconductor Chip 审中-公开
生产半导体芯片的方法和相应的半导体芯片

  • 专利标题: Method for Producing Semiconductor Chips and Corresponding Semiconductor Chip
  • 专利标题(中): 生产半导体芯片的方法和相应的半导体芯片
  • 申请号: US12746096
    申请日: 2008-12-08
  • 公开(公告)号: US20110175238A1
    公开(公告)日: 2011-07-21
  • 发明人: Stefan Illek
  • 申请人: Stefan Illek
  • 优先权: DE102007061469.3 20071220; DE102008014121.6 20080313
  • 国际申请: PCT/DE2008/002056 WO 20081208
  • 主分类号: H01L23/12
  • IPC分类号: H01L23/12 H01L21/50
Method for Producing Semiconductor Chips and Corresponding Semiconductor Chip
摘要:
A method for producing a plurality of semiconductor chips is specified. A plurality of semiconductor bodies is provided on a substrate, wherein the semiconductor bodies are spaced apart from one another by interspaces. A structured carrier is provided, having a plurality of elevations. The structured carrier is positioned relative to the substrate in such a way that the elevations of the structured carrier extend into the interspaces between the semiconductor bodies A mechanically stable assemblage is produced, comprising the substrate and the structured carrier. The assemblage is singulated into a plurality of semiconductor chips.
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