发明申请
- 专利标题: FABRICATION METHOD OF PACKAGE STRUCTURE HAVING MEMS ELEMENT
- 专利标题(中): 具有MEMS元件的封装结构的制造方法
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申请号: US12769087申请日: 2010-04-28
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公开(公告)号: US20110177643A1公开(公告)日: 2011-07-21
- 发明人: Chi-Hsin Chiu , Chih-Ming Huang , Chang-Yueh Chan , Hsin-Yi Liao , Chun-Chi Ke
- 申请人: Chi-Hsin Chiu , Chih-Ming Huang , Chang-Yueh Chan , Hsin-Yi Liao , Chun-Chi Ke
- 申请人地址: TW Taichung
- 专利权人: SILICONWARE PRECISION INDUSTRIES CO., LTD.
- 当前专利权人: SILICONWARE PRECISION INDUSTRIES CO., LTD.
- 当前专利权人地址: TW Taichung
- 优先权: TW099101443 20100120
- 主分类号: H01L21/56
- IPC分类号: H01L21/56 ; H01L21/60
摘要:
A fabrication method of a package structure having at least an MEMS element is provided, including: preparing a wafer having electrical connection pads and the at least an MEMS element; disposing lids for covering the at least an MEMS element, the lids having a metal layer formed thereon; electrically connecting the electrical connection pads and the metal layer with bonding wires; forming an encapsulant for covering the lids, bonding wires, electrical connection pads and metal layer; removing portions of the encapsulant to separate the bonding wires each into first and second sub-bonding wires, wherein top ends of the first and second sub-bonding wires are exposed, the first sub-bonding wires electrically connecting to the electrical connection pads, and the second sub-bonding wires electrically connecting to the metal layer; forming metallic traces on the encapsulant for electrically connecting to the first sub-bonding wires; forming bumps on the metallic traces; and performing a singulation process.
公开/授权文献
- US08420430B2 Fabrication method of package structure having MEMS element 公开/授权日:2013-04-16
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