发明申请
- 专利标题: NON-VOLATILE MEMORY DEVICE HAVING BOTTOM ELECTRODE
- 专利标题(中): 具有底电极的非易失性存储器件
-
申请号: US13087189申请日: 2011-04-14
-
公开(公告)号: US20110193048A1公开(公告)日: 2011-08-11
- 发明人: Gyu-Hwan Oh , Sug-Woo Jung , Dong-Hyun Im
- 申请人: Gyu-Hwan Oh , Sug-Woo Jung , Dong-Hyun Im
- 申请人地址: KR Gyeonggi-do
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Gyeonggi-do
- 优先权: KR10-2007-0059273 20070618; KR10-2010-0116251 20101122
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
Provided is a non-volatile memory device including a bottom electrode disposed on a substrate and having a lower part and an upper part. A conductive spacer is disposed on a sidewall of the lower part of the bottom electrode. A nitride spacer is disposed on a top surface of the conductive spacer and a sidewall of the upper part of the bottom electrode. A resistance changeable element is disposed on the upper part of the bottom electrode and the nitride spacer. The upper part of the bottom electrode contains nitrogen (N).
公开/授权文献
- US08237149B2 Non-volatile memory device having bottom electrode 公开/授权日:2012-08-07
信息查询
IPC分类: