发明申请
US20110203310A1 RAW MATERIAL RECOVERY METHOD AND TRAPPING MECHANISM FOR RECOVERING RAW MATERIAL
有权
用于回收原材料的原材料回收方法和捕获机理
- 专利标题: RAW MATERIAL RECOVERY METHOD AND TRAPPING MECHANISM FOR RECOVERING RAW MATERIAL
- 专利标题(中): 用于回收原材料的原材料回收方法和捕获机理
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申请号: US13057372申请日: 2009-08-04
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公开(公告)号: US20110203310A1公开(公告)日: 2011-08-25
- 发明人: Atsushi Gomi , Yasushi Mizusawa , Tatsuo Hatano , Masamichi Hara , Kaoru Yamamoto , Chiaki Yasumuro
- 申请人: Atsushi Gomi , Yasushi Mizusawa , Tatsuo Hatano , Masamichi Hara , Kaoru Yamamoto , Chiaki Yasumuro
- 申请人地址: JP Tokyo
- 专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-204767 20080807
- 国际申请: PCT/JP2009/063824 WO 20090804
- 主分类号: B01D53/14
- IPC分类号: B01D53/14 ; F25J1/02 ; B01D47/00 ; B01D53/78
摘要:
A raw material recovery method for recovering a raw material of an organic metallic compound, which has the property of being stable toward a specific refrigerant without being decomposed thereby, from exhaust gas discharged from a treatment container in which a metallic thin film is formed on the surface of an object to be treated by using source gas obtained by vaporizing the raw material is characterized by being provided with a solidification step for solidifying the unreacted source gas by cooling the exhaust gas by bringing the exhaust gas into contact with the refrigerant and reprecipitating the raw material, and a recovery step for separating and recovering the raw material reprecipitated in the solidification step from the refrigerant. To provide a method for controlling an exhaust gas flow rate so that flow of gas in a processing chamber becomes uniform.