发明申请
- 专利标题： LIQUID COMPOSITION CONTAINING AMINOETHER FOR DEPOSITION OF METAL-CONTAINING FILMS
- 专利标题（中）： 含有金属膜的含有氨基甲酸酯的液体组合物
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申请号： US12871284申请日： 2010-08-30
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公开(公告)号： US20110212629A1公开(公告)日： 2011-09-01
- 发明人: Sergei Vladimirovich Ivanov , Xinjian Lei , Daniel P. Spence , John Anthony Thomas Norman , Laura M. Matz
- 申请人： Sergei Vladimirovich Ivanov , Xinjian Lei , Daniel P. Spence , John Anthony Thomas Norman , Laura M. Matz
- 申请人地址： US PA Allentown
- 专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人： AIR PRODUCTS AND CHEMICALS, INC.
- 当前专利权人地址： US PA Allentown
- 主分类号： H01L21/31
- IPC分类号： H01L21/31 ; C09D7/12
摘要：
A formulation, comprising: a) at least one metal-ligand complex, wherein one or more ligands are selected from the group consisting of β-diketonates, β-ketoiminates, β-ketoesterates, β-diiminates, alkyls, carbonyls, alkyl carbonyls, cyclopentadienyls, pyrrolyls, alkoxides, amidinates, imidazolyls, and mixtures thereof; and the metal is selected from Group 2 to 16 elements of the Periodic Table of the Elements; and, b) at least one aminoether selected from the group consisting of R1R2NR3OR4NR5R6, R1OR4NR5R6, O(CH2CH2)2NR1, R1R2NR3N(CH2CH2)2O, R1R2NR3OR4N(CH2CH2)2O, O(CH2CH2)2NR1OR2N(CH2CH2)2O, and mixtures thereof, wherein R1-6 are independently selected from group consisting of C1-10 linear alkyl, C1-10 branched alkyl, C1-10 cyclic alkyl, C6-C10 aromatic, C1-10 alkylamine, C1-10 alkylaminoalkyl, C1-10 ether, C4-C10 cyclic ether, C4-C10 cyclic aminoether, and mixture thereof.
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