发明申请
- 专利标题： Apparatus for producing trichlorosilane
- 专利标题（中）： 三氯硅烷生产设备
-
申请号： US13064106申请日： 2011-03-07
-
公开(公告)号： US20110215084A1公开(公告)日： 2011-09-08
- 发明人: Masami Miyake , Kazuki Mizushima , Wataru Saiki , Naoya Murakami
- 申请人： Masami Miyake , Kazuki Mizushima , Wataru Saiki , Naoya Murakami
- 申请人地址： JP Tokyo
- 专利权人： MITSUBISHI MATERIALS CORPORATION
- 当前专利权人： MITSUBISHI MATERIALS CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2010-050381 20100308
- 主分类号： H05B3/02
- IPC分类号： H05B3/02
摘要：
An apparatus for producing trichlorosilane from raw gas containing silicon tetrachloride and hydrogen, having: a reaction chamber being supplied with the raw gas for generating reacted gas containing trichlorosilane and hydrogen; a plurality of heaters heating the raw gas and having exothermic portions being disposed along a vertical direction in the reaction chamber; a plurality of electrodes being connected to basal portions of the heaters; and a radiation plate being disposed between the exothermic portions of the heaters.
公开/授权文献
- US09468042B2 Apparatus for producing trichlorosilane 公开/授权日：2016-10-11
信息查询
