发明申请
US20110244399A1 METHOD OF FORMING RESIST PATTERN AND NEGATIVE TONE-DEVELOPMENT RESIST COMPOSITION
有权
形成电阻图案和负极色调发展电阻组合物的方法
- 专利标题: METHOD OF FORMING RESIST PATTERN AND NEGATIVE TONE-DEVELOPMENT RESIST COMPOSITION
- 专利标题(中): 形成电阻图案和负极色调发展电阻组合物的方法
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申请号: US13028594申请日: 2011-02-16
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公开(公告)号: US20110244399A1公开(公告)日: 2011-10-06
- 发明人: Tomoyuki HIRANO , Takahiro DAZAI , Daiju SHIONO
- 申请人: Tomoyuki HIRANO , Takahiro DAZAI , Daiju SHIONO
- 申请人地址: JP Kawasaki-shi
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2010-033426 20100218; JP2010-146284 20100628
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
A method of forming a resist pattern, including: forming a resist film on a substrate using a resist composition containing a base component (A) which exhibits decreased solubility in an organic solvent under action of an acid and an acid-generator component (B) which generates an acid upon exposure, conducting exposure of the resist film, and patterning the resist film by a negative tone development using a developing solution containing an organic solvent, wherein the base component (A) includes a resin component (A1) containing a structural unit (a1) derived from an acrylate ester containing an acid decomposable group which exhibits increased hydrophilicity by the action of an acid and a structural unit (a0) derived from an acrylate ester containing an —SO2— containing cyclic group.
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