发明申请
US20110248350A1 METHOD AND STRUCTURE FOR WORK FUNCTION ENGINEERING IN TRANSISTORS INCLUDING A HIGH DIELECTRIC CONSTANT GATE INSULATOR AND METAL GATE (HKMG)
有权
包括高介电常数门绝缘子和金属栅的晶体管中的工作功能工程的方法和结构(HKMG)
- 专利标题: METHOD AND STRUCTURE FOR WORK FUNCTION ENGINEERING IN TRANSISTORS INCLUDING A HIGH DIELECTRIC CONSTANT GATE INSULATOR AND METAL GATE (HKMG)
- 专利标题(中): 包括高介电常数门绝缘子和金属栅的晶体管中的工作功能工程的方法和结构(HKMG)
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申请号: US12757323申请日: 2010-04-09
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公开(公告)号: US20110248350A1公开(公告)日: 2011-10-13
- 发明人: Michael P. Chudzik , William K. Henson , Unoh Kwon
- 申请人: Michael P. Chudzik , William K. Henson , Unoh Kwon
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/28 ; H01L29/78
摘要:
Adjustment of a switching threshold of a field effect transistor including a gate structure including a Hi-K gate dielectric and a metal gate is achieved and switching thresholds coordinated between NFETs and PFETs by providing fixed charge materials in a thin interfacial layer adjacent to the conduction channel of the transistor that is provided for adhesion of the Hi-K material, preferably hafnium oxide or HfSiON, depending on design, to semiconductor material rather than diffusing fixed charge material into the Hi-K material after it has been applied. The greater proximity of the fixed charge material to the conduction channel of the transistor increases the effectiveness of fixed charge material to adjust the threshold due to the work function of the metal gate, particularly where the same metal or alloy is used for both NFETs and PFETs in an integrated circuit; preventing the thresholds from being properly coordinated.
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