发明申请
- 专利标题： SUBSTRATE HOLDER STOCKER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE HOLDER MOVING METHOD USING THE SUBSTRATE HOLDER STOCKER DEVICE
- 专利标题（中）： 基板支架装置，基板处理装置和基板支架移动方法，使用基板支架储存器装置
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申请号： US13177735申请日： 2011-07-07
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公开(公告)号： US20120006257A1公开(公告)日： 2012-01-12
- 发明人: Ryuji Higashisaka , Hiroshi Sone
- 申请人： Ryuji Higashisaka , Hiroshi Sone
- 申请人地址： JP Kawasaki-shi
- 专利权人： CANON ANELVA CORPORATION
- 当前专利权人： CANON ANELVA CORPORATION
- 当前专利权人地址： JP Kawasaki-shi
- 优先权： JP2010-156324 20100709
- 主分类号： C23C14/00
- IPC分类号： C23C14/00 ; B65G47/00
摘要：
A substrate holder stocker device capable of reducing foot print is provided. The device includes: a movable table A which holds a plurality of substrate holders side by side in a plate thickness direction thereof and moves back and forth; a movable table B which is provided parallel to the movable table A and holds a plurality of the substrate holders side by side in a plate thickness direction thereof, and which moves back and forth; and an inter-table transfer mechanism for allowing the substrate holder which is held by one of the movable tables A and B stopped at predetermined positions to be held by the other of the movable tables A and B.
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